Microstructure and properties of
nanosemicrystalline Si3N4
ceramics with doped sintering additives: Part I. Microstructural
characterization of nanosemicrystalline
Si3N4
powdersK.H. Ryu, J-M. Yang
(University of California-Los Angeles)
The
characteristics of nanosized silicon nitride powders with doped
Y2O3 and
Al2O3 fabricated by a
plasma-reacted chemical process were investigated. The chemical
compositions of the powders were analyzed by wet chemical analysis. The
morphology and the size distribution were determined by transmission
electron microscopy (TEM). TEM with energy dispersive spectroscopy
(EDS) was used to verify the existence of sintering additives in each
individual particle. The crystal structure of the powders was identified
by the selected area diffraction pattern (SADP). X-ray diffraction (XRD)
technique was used for phase analysis and the measurement of degree of
crystallinity. The characteristics of chemical bonding were analyzed by
using Fourier transform infrared spectroscopy (FTIR).
Order No.:
JA809-033 © 1998 MRS
Go to September 1998 Table of Contents
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