The effects of chloromethane on diamond
nucleation and growth in a hot-filament chemical vapor deposition
reactorJ-J. Wu, F.C-N. Hong
(National Cheng-Kung University)
The effects
of chloromethane on diamond nucleation and growth were studied by
employing laser reflective interferometry. Chloromethane enhances the
film-growth-rate only slightly compared to methane. However, chloromethane
greatly enhances the nucleation density and shortens the film-forming
stage, more significantly at a lower temperature. Thus chloromethane
facilitates the low temperature growth mainly through the enhancement of
nucleation. Nucleation density is strongly dependent on the compositions
of H atoms and carbon species prior to diamond growth. The residual
diamond seeds by diamond-grit-scratching are suggested to be the major
nucleation sites. Chloromethane can enhance diamond nucleation by
protecting the residual seeds from being etched by H atoms.
Order No.:
JA809-022 © 1998 MRS
Go to September 1998 Table of Contents
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