W-Ti-O layers for gas sensing applications. Structure, morphology, and electrical properties
L. Sangaletti*, E. Bontempi*, L.E. Depero*, R. Salari*, P. Nelli*, G. Sberveglieri*, P. Galinetto+, M. Ferroni#, V. Guidi#, G. Martinelli#
(*Università di Brescia, +Università di Pavia, #Università di Ferrara)
The kinetics of phase transition and phase segregation induced by annealing temperature on Ti-W-O gas sensing layer was studied by x-ray diffraction, Raman spectroscopy and scanning electron microscopy. The main goal was to identify, on the basis of kinetics studies, structurally stable Ti-WO₃ thin film phases and compare their response to polluting gases in order to determine possible correlations between structural and electrical properties of the sensing layers.
Keywords: ceramics; electrical properties; thin film
Order No.: JA806-020 © 1998 MRS

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