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2005 SPRING MEETING PROCEEDINGS

Symposium J
Micro- and Nanosystems—Materials and Devices

Editors: Cengiz S. Ozkan, David A. LaVan, Mark McNie, Somuri Prasad

MRS Proceedings Volume 872
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Suggested format for citation of papers in this volume:
List all author names: Title of article, in Micro- and Nanosystems—Materials and Devices, edited by Cengiz S. Ozkan, David A. LaVan, Mark McNie, and Somuri Prasad (Mater. Res. Soc. Symp. Proc. 872, Warrendale, PA , 2005), insert paper number.

Modification of Deposition Process of Piezoelectric Polycrystalline Film by Hydrothermal Method -- Improvement of the Deposition Process by Pre-Treatment Using Hydrogen Peroxide J1.3
Akito Endo, Norimichi Kawashima, Shinichi Takeuchi, Mutsuo Ishikawa, and Minoru Kurosawa

Micromirror Arrays for High Temperature Operation J1.4
Mahmoud F. Almasri and Bruno A. Frazier

Anchoring of Organic Molecules on Cu(001) Surface Through S-Headgroup J2.2
P. Monachesi, L. Chiodo, F. Bussolotti, M.G. Betti, and C. Mariani

In Situ Pretreatment Approach for Surface Deterioration Alleviation Amidst Thermal Desorption of Si(100) J2.3
A.F. Pun, X. Wang, J.B. Meeks, S.M Durbin, and J.P. Zheng

Significance of Surface Topography on Performance and Lifetime of MEMS Switches and Relays J2.4
Lior Kogut and Kyriakos Komvopoulos

Effects of Hydrogen Annealing Process Conditions on Nano Scale Silicon (011) Fins J3.1
Rownak J. Zaman, Weize Xiong, Rudy Quintanilla, Thomas Schulz, C. Rinn Cleavelin, Rick Wise, Mike Pas, Paul Patruno, Klaus Schruefer, and Sanjay K. Banerjee

Detection of Residual Stress in Silicon Carbide MEMS by µ-Raman Spectroscopy J3.4
John C. Zingarelli, Michael A. Marciniak, and Jason R. Foley

Strain Transduction in Conductor-Modified Polymers J3.6
Eerik T. Hantsoo, Vanessa B. Chial, Yanan Zhao, Kevin C. Chan, Klint A. Rose, Kenneth S. Wu, and Beth L. Pruitt

Characterization of Ti/TiN and TiN Conductive Layer for High Temperature MEMS Devices J4.2
Peter Lange, Birger Ohlsen, Sebastian Puls, and Joerg Syre

Exchange Spring Type Magnet Realized in FePt/Fe Multilayers Deposited by Magnetron Sputtering J4.3
Yousong Gu, Dayong Zhang, Xiaoyuan Zhan, Zhen Ji, Xiaolan Zhen, and Yue Zhang

Fabrication of Electrical Nanocontacts to Nanometer-Sized Materials and Structures Using a Focused Ion Beam J5.2
F. Hernández-Ramírez, O. Casals, J. Rodríguez, A. Vilà, A. Romano-Rodríguez, J.R. Morante, M.Abid, and S.Valizadeh

Through-Wafer Polysilicon Interconnect Fabrication With In-Situ Boron Doping J5.5
Ismo Luusua, Kimmo Henttinen, Panu Pekko, Tapani Vehmas, and Hannu Luoto

Low Temperature MEMS Manufacturing Processes: Plasma Activated Wafer Bonding J7.1
Viorel Dragoi, Sharon Farrens, and Paul Lindner

Spontaneous Growth of Nickel Silicide Nanowires and Formation of Self-Assembled Nanobridges by the Metal Induced Growth Method J7.2
Joondong Kim, Wayne A. Anderson, and Young-Joo Song

Self Assembled Monolayer Methods in the Fabrication of High-Tc Superconductor SNS Junction Nano-Devices J7.4
Sungwook Kim, In Soon Chang, Fannyben Patel, and John T. McDevitt

Electrical and Optical Properties of Self-Assembled, Ordered Gold Nanocrystal/Silica Thin Films Prepared by Sol-Gel Processing J7.5
Kai Yang, Hongyou Fan, Michael J. O'Brien, Sima La Fontaine, Gabriel P. Lopez, Kevin J. Malloy, C. Jeffrey Brinker, and Thomas W. Sigmon

Micro-Molded High Q Polymer Resonators for Optical Loss Determination J8.1
Andrea L. Martin, Akil Srinivasan, Deniz K. Armani, Bumki Min, and Kerry J. Vahala

Fine-Tuning of the Spectral Collection Efficiency in a Multilayer Junction Through the LSP Technique J8.3
M. Fernandes, A. Fantoni, M. Niehus, P. Louro, G. Lavareda, C. N. Carvalho, and M. Vieira

Mechanically Tunable Nanophotonic Devices J8.6
W. Park, E. Schonbrun, M. Tinker, Q. Wu, and J.-B. Lee

Micrometer Scale Silicon Dioxide Tunnels for On-Chip Fluidic Sample Delivery to Nanometer-Scale Chemical Sensors J9.1
Ali Gokirmak and Sandip Tiwari

A Fabrication of a Novel Microfluidic Reactor Microsynthesis of MIP's Particles J9.4
Kyung M. Choi, John A. Rogers, and Kenneth J. Shea

Oligonucleotide Metallization for Conductive Bio-Inorganic Interfaces in Self Assembled Nanoelectronics and Nanosystems J10.2
Xu Wang, Krishna Singh, Chris Tsai, Roger Lake, Alexander Balandin, Mihri Ozkan, and Cengiz Ozkan

Efficient Atomization Using MHz MEMS-Based Ultrasonic Nozzles J10.6
Shirley C. Tsai, Yu L. Song, Yuan F. Chou, J.H Cheng, and Chen S. Tsai

Thin Film Silicon Microbridges for DNA Detection J11.2
T. Adrega, J. Gaspar, F. Fixe, V. Chu, D.M.F. Prazeres, and J.P. Conde

Fabrication and Electromechanical Properties of Conductive Polymer Microbridge Actuators J11.3
Guandong Zhang, Joao Gaspar, Virginia Chu, and Joao Pedro Conde

Low-Cost and Chemical Resistant Microfluidic Devices Based on Thermoplastic Elastomers for a Novel Biosensor System J11.4
I. Stoyanov, M. Tewes, S. Glass, M. Koch, and M. Löhndorf

Multi-Layer Photopolymer Micromachining J11.5
J.R. Huang, B. Bai, J. Shaw, T.N. Jackson, C.Y. Wei, V. Manivannan, and K. Durocher

A Novel Latching Relay Fabricated Using an Oxide Molded Tungsten Process J11.6
J.G. Fleming, Michael Baker, and David Luck

Hot Embossing Lithography: Release Layer Characterization by Chemical Force Microscopy J12.2
Neil S. Cameron, Arnaud Ott, Hélène Roberge, and Teodor Veres

Carbohydrate-Carbohydrate Recognition Promotes Cell Adhesion J12.4
Christine Gourier, Eric Perez, Yongmin Zhang, and Pierre Sinaÿ

Fabrication and Evaluation of Conducting Polymer Nanowire Heterostructures J13.4
Yevgeny Berdichevsky and Y.-H. Lo

Composition Influence on the Properties of Titanium-Doped Gamma Iron Oxide Nanoparticles Prepared by Laser Pyrolysis Method J13.5
Ion Morjan, Rodica Alexandrescu, Florian Dumitrache, Ion Sandu1, Monica Scarisoreanu, Lavinia Albu, Iuliana Soare, Ion Voicu, Bohumil David, Oldrich Schneeweiss, Claudiu Fleaca, Ernest Popovici, and Victor Ciupina

A Systematic Study of the Formation of Nano-Tips on Silicon Thin Films by Excimer Laser Irradiation J13.6
D.G. Georgiev, R.J. Baird, I. Avrutsky, G. Auner, G. Newaz, and N. Tokranova

Functionally Engineered Carbon Nanotubes-Peptide Nucleic Acid Nanocomponents J13.7
Krishna V. Singh, Xu Wang, Rajeev R. Pandey, Roger Lake, Cengiz S. Ozkan, and Mihrimah Ozkan

Investigation of Electric Characteristics of Nanoscale Composite A1B5C6 Semiconductors: Experiment and Numerical Simulation J13.8
H. Khlyap, V. Bilozertseva, L. Panchenko, P. Shkumbatiuk, and M. Andrukhiv

Etching Silicon Through an Effective Nanomask: An Electrochemical Way to Nanomachining J13.9
Stefano Borini, Andrea M. Rossi, Luca Boarino, and Giampiero Amato

An Optical Diffraction Microphone With Active Grating Diaphragm J13.11
Kazuhiro Suzuki, Hideyuki Funaki, and Yujiro Naruse

Fabrication of a Bimodal Ferromagnetic Nanosystem in an Etched Silicon Structure and Its Magnetic and Magneto-Optic Characterization J13.13
P. Granitzer, K. Rumpf, P. Pölt, A. Reichmann, S. Surnev, and H. Krenn

Nanocomposite Thin Film Coatings for Protection of Materials Surfaces J13.14
R. Asmatulu, R.O. Claus, J.B. Mecham, S.G. Corcoran, and Y.X. Wang

Embedded Piezoresistive Microcantilever Sensors: Materials for Sensing Chemical and Biological Analytes J13.18
Timothy L. Porter, William Delinger, and Robert L. Gunter

Interpretation of the Phonon Frequency Shifts in ZnO Quantum Dots J13.21
Khan A. Alim, Vladimir A. Fonoberov, and Alexander A. Balandin

In Vivo Biostability of CVD Silicon Oxide and Silicon Nitride Films J14.3
John M. Maloney, Sara A. Lipka, and Samuel P. Baldwin

In Situ Pretreatment Approach for Surface Deterioration Alleviation Amidst Thermal Desorption of GaAs(100) J14.4
A.F. Pun, X. Wang, J.B. Meeks, S.M Durbin, and J.P. Zheng

Effect of Dopants on the Band Structure of Barium Strontium Titanate Thin Films J14.5
Yuebing Zheng, Shijie Wang, and Cheng Hon A. Huan

Multi-Band Terahertz Imaging System Design J15.3
Liviu Popa-Simil

A Wide Band Gap Boron-Doped Microcrystalline Silicon Film Obtained With VHF Glow Discharge Method J15.5
Feng Zhu, Ying Zhao, Changcun Wei, Xiaodan Zhang, Yantao Gao, Jian Sun, and Xinhua Geng

Diode Laser Bonding of Planar MEMS, MOEMS, and Microfluidic Devices J15.6
Jie-Wei Chen, Jerry Zybko, and James Clements

Investigating Narrow Plasmons in Nanoparticle Arrays Fabricated Using Electron Beam Lithography J16.1
Erin M. Hicks, Linda Gunnarrsson, Tomas Rindevicius, Shengli Zou, Bengt Kasemo, Mikael Käll, Goerge C. Schatz, Kenneth G. Spears, and Richard P. Van Duyne

Microchannel Arrays in Borophosphosilicate Glass for Photonic Device and Optical Sensor Applications J16.3
Claire L. Callender, Patrick Dumais, Chantal Blanchetière, Christopher J. Ledderhof, and Julian P. Noad

Development of Humidity Sensors Using Layer-by-Layer NanoAssembly of Polypyrrole J16.4
R. Nohria, Y. Su, R.K. Khillan, R. Dikshit,Y. Lvov, and K. Varahramyan

Stabilized Pd-Alloy/AlN/Si Hydrogen Sensors J16.5
Linfeng Zhang, Ibrahim Al-Homoudi, Md.H. Rahman, Erik F. McCullen, Lajos Rimai, Ronald J. Baird, Ratna Naik, Golam Newaz, Gregory W. Auner, and K.Y. Simon Ng

Multi-Technology Measurements of Amorphous Carbon Films J17.5
Jingmin Leng, Jon Opsal, Heath Pois, Osman Sorkhabi, Xiaoping Liu, and Stephen J. Morris

Towards Novel Light-Activated Shape Memory Polymer: Thermomechanical Properties of Photo-responsive Polymers J18.6
Emily A. Snyder and Tat H. Tong

Surface Modification and Neural Tissue Culture of Thin Film Electrode Materials J18.8
Sachin Thanawala, Saida. P. Khan , Olena Palyvoda, Daniel. G. Georgiev, Ibrahim A. Al-Homoudi, Golam Newaz, and Gregory Auner

Atomic Force Microscopy Probe With Integrated Loop and Shielded Leads for Micromagnetic Sensing J18.9
D.P. Lagally, A. Karbassi, Y. Wang, C.A. Paulson, and D.W. van der Weide

Functionalization of Microfluidic Channels With In Situ Grown Carbon Nanotubes J18.10
K. Gjerde, T. Schurmann, K.B.K. Teo, M. Aono, W.I. Milne, and P. Bøggild

Growth, Characterization and Processing of VO2 Thin Films for Micro-Switching Devices J18.11
Mohamed Soltani, Luc Stafford, Mohamed Chaker, and Joëlle Margot

Effects of Substrate Materials on the Electrical Behavior of Pd/AlN/Semiconductor Based Hydrogen Sensors J18.12
Md. H. Rahman, L. Zhang, L. Rimai, R.J. Baird, R. Naik, K.Y.S. Ng, G. Auner, G. Newaz

Ultra-Fine ZnO Nanobelts and Their Photoluminescence Emission J18.16
Aurangzeb Khan and Martin E. Kordesch

Synthesis of Nanoscale Devices for Neural Electrophysiological Imaging J18.17
Ludovico M. Dell'Acqua-Bellavitis, Jake D. Ballard, Rena Bizios, and Richard W. Siegel

Anomalous Temperature Dependence of Fermi-Edge Singularity in Modulation Doped AlGaAs/InGaAs/GaAs Heterostructures J18.18
K. Gopalakrishna Naik, K.S.R.K. Rao, T. Srinivasan, R. Muralidharan, and S.K. Mehta

Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites J18.21
Abu Samah Zuruzi, Marcus S. Ward, Chang Song Ding, and Noel C. MacDonald

Thermally Stimulated Electron Emission from Scratched Metal Surfaces J18.24
Keiji Nakayama and Hitoshi Matamura

Fabrication Methods for Improved Electromechanical Behavior in Piezoelectric Membranes J18.26
M.C. Robinson, P.D. Hayenga, J.H. Cho, C.D. Richards, R.F. Richards, and D.F. Bahr

Quantum Sizing of Power Electronics: A Trend Towards Miniaturization of Power Electronic Systems and Equipments J18.28
Arindam Chakraborty and Ali Emadi

In Search of Metallic Nanowires on Si(001) J18.29
Inder P. Batra, Bikash C. Gupta, and Aakanksha A. Panjwani

Space Charge Limited Current in Porous Silicon With Traces of Nitrogen Dioxide J18.30
Stefano Borini, Andrea M. Rossi, Luca Boarino, and Giampiero Amato

Functional Carbon Nanotube Substrates for Tissue Engineering Applications J18.32
X. Zhang, C. Ozkan, S. Prasad , M. Ozkan, and S. Niyogi

Influence of Growth Parameters and Annealing on Properties of MBE Grown GaAsSbN SQWs J18.34
Liangjin Wu, Shanthi Iyer, Kalyan Nunna, Sudhakar Bharatan, Jia Li, and Ward J. Collis

Critical Process Issues in the Fabrication of a Lateral, Self-Cleaning, MEMS Switch J19.3
Yong Shi and Sang-Gook Kim

Self Organized InAs Quantum Dots on Patterned GaAs Substrates J19.4
M. Schramboeck, W. Schrenk, A. M. Andrews, T. Roch, G. Fasching, W. Brezna, A. Lugstein, and G. Strasser

Colloidal Crystal Wires From Directed Assembly J20.3
Feng Li, Xavier Bade, Jan Linnros, and John B. Wiley

The Performance of the Gate Electrode Using Co Thin Films Selectively Deposited on SAMs Patterns for a-Si TFT J20.4
H.J. Yang, J.G. Lee, B.S. Cho, J.H. Lee, C.O. Jeong, and K.H. Chung

Surface Electronic States and Electrostatic Attractive Forces Betwe
en Metals or Semiconductor and Tribocharged Polymers J21.1
Yoshihiro Momose, Masahiro Umeki, Daisuke Suzuki, and Keiji Nakayama

Chirality Characterization of Dispersed Single Wall Carbon Nanotubes J21.2
Min Namkung, Phillip A. Williams, Candis D. Mayweather, Buzz Wincheski, Cheol Park , and Juock S. Namkung

Energetic Neutral Atom Beam Lithography/Epitaxy for Nanoscale Device Fabrication J21.3
Elshan A. Akhadov, Alexander H. Mueller, and Mark A. Hoffbauer

TiN/GaN Metal/Semiconductor Multilayer Nanocomposites Grown by Reactive Pulsed Laser Deposition J21.4
Vijay Rawat and Timothy D. Sands

Zinc Powder Evaporation: An Efficient Way of Synthesizing a Wide Range of High-Quality ZnO Nanostructures at Lower Temperature J21.6
Yue Zhang, Jian He, Yunhua Huang, Yousong Gu, Zhen Ji, and Cheng Zhou



 






 

 

 








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