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2005 SPRING MEETING PROCEEDINGS

Symposium A
Amorphous and Nanocrystalline Silicon Science and Technology—2005

Editors: Robert W. Collins, P. Craig Taylor, Michio Kondo, Reinhard Carius, Rana Biswas

MRS Proceedings Volume 862
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Suggested format for citation of papers in this volume:
List all author names: Title of article, in Amorphous and Nanocrystalline Silicon Science and Technology—2005, edited by Robert W. Collins, P. Craig Taylor, Michio Kondo, Reinhard Carius, and Rana Biswas (Mater. Res. Soc. Symp. Proc. 862, Warrendale, PA , 2005), insert paper number.

Urbach Edge, Disorder, and Absorption On-Set in a-Si:H A1.3
G.D. Cody

A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices A2.1
Christine Esber Richardson, Brendan M. Kayes, Matthew J. Dicken, and Harry A. Atwater

Suppression of Nucleation During the Aluminum-Induced Layer Exchange Process A2.2
Jens Schneider, Juliane Klein, Andrey Sarikov, Martin Muske, Stefan Gall, and Walther Fuhs

Silicon Homoepitaxy Using Tantalum-Filament Hot-Wire Chemical Vapor Deposition A2.3
Charles W. Teplin, Eugene Iwaniczko, Kim M. Jones, Robert Reedy, Bobby To, and Howard M. Branz

Application of Field-Enhanced Rapid Thermal Annealing to Activation of Doped Polycrystalline Si Thin Films A2.4
B.S. So, Y.H. You, H.J. Kim, Y.H. Kim, J.H. Hwang, D.H. Shin, S.R. Ryu, K. Choi, and Y.C. Kim

Formation of a Miscibility Gap in Laser-Crystallized Poly-SiGe Thin Films A2.5
M. Weizman , N.H. Nickel, I. Sieber, and B. Yan

Ge Growth on Nanostructured Silicon Surfaces A2.6
Ganesh Vanamu, Abhaya K. Datye, and Saleem H. Zaidi

The Role of SiH3 Diffusion in Determining the Surface Smoothness of Plasma-Deposited Amorphous Si Thin Films: An Atomic-Scale Analysis A3.2
Mayur S. Valipa, Tamas Bakos, Eray S. Aydil, and Dimitrios Maroudas

Initial Stage Hydrogen Movement and IR Absorption Proportionality Constants In Hot-Wire Deposited SiN1.2:H During High-Temperature Annealing A3.4
H.D. Goldbach, V. Verlaan, C.H.M. van der Werf, W.M. Arnoldbik, H.C. Rieffe, I.G. Romijn, A.W. Weeber, and R.E.I. Schropp

Conductance Fluctuations in Amorphous Silicon Nanoparticles A4.1
T.J. Belich, Z. Shen, C. Blackwell, S.A. Campbell2, and J. Kakalios

High-Yield Synthesis of Luminescent Silicon Quantum Dots in a Continuous Flow Nonthermal Plasma Reactor A4.3
L. Mangolini, E. Thimsen, and U. Kortshagen

Wiring and Introduction of Single Silicon Nanocrystals Into Multi-Walled Carbon Nanotubes A4.5
Vladimir Švrcek, Francois Le Normand, Ovidui Ersen, Coung Pham-Huu, Dominique Begin, Benoit Louis, and Marc-Jaques Ledoux

Metastable Changes in the Photoconductive Properties of Microcrystalline Silicon Upon Heat Treatment A5.1
R. Brüggemann

Effects of Post Annealing and Material Stability on Undoped and n+ nc-Si:H Films Deposited at 75°C Using 13.56 MHz PECVD A5.4
Czang-Ho Lee, Andrei Sazonov, and Arokia Nathan

Transport and Meyer-Neldel Rule in Microcrystalline Silicon Films A5.6
Steve Reynolds, Vlad Smirnov, Friedhelm Finger, Charlie Main, and Reinhard Carius

Characterization of Silicon Thin Film Deposited by E-Beam Evaporator for Flexible Display A5.8
In-Hyuk Song, Sang-Myeon Han, Jung-Hyun Park , and Min-Koo Han

Correlation of In and Ex Situ Stress to Microstructures During Al-Induced Crystallization of PECVD Amorphous Silicon A6.1
S. Ray, Y.G. Lian, V. Sriram, D.J. Tucker, and G.Z. Pan

Micro-Crystalline Silicon-Germanium Thin Films Prepared by the Multi-Target RF Sputtering System A6.2
Toru Ajiki, Isao Nakamura, and Masao Isomura

Poly-Crystalline Ge Thin Films Prepared by RF Sputtering Method for Thermo Photo Voltaic Application A6.5
Daisuke Hoshi, Isao Nakamura, and Masao Isomura

TCAD Modeling of Metal Induced Lateral Crystallization of Amorphous Silicon A6.6
Aleksey M. Agapov, Valeri V. Kalinin, Alexandre M. Myasnikov, Vincent M.C. Poon, and Bert Vermeire

Electron Field Emission From SiC/Si Heterostructures Formed by Carbon Implantation Into Silicon and Etching of the Top Silicon Layer A6.7
Yumei Xing, Jihua Zhang, Yuehui Yu, Zhaorui Song, and Dashen Shen

Excimer Laser Crystallized HWCVD Thin Silicon Films: Electron Field Emission A6.8
M.Z. Shaikh, K.A. O'Neill, S.K. Persheyev, and M.J. Rose

GaAs Growth on Micro and Nano Patterned Ge/Si1-xGex and Si Surfaces A6.9
Ganesh Vanamu, Abhaya K. Datye, Ralph L. Dawson, and Saleem H. Zaidi

Light-Intensity Dependence of the Staebler-Wronski Effect in a-Si:H With Various Densities of Defects A7.1
Minoru Kumeda, Ryohei Sakai, Akiharu Morimoto, and Tatsuo Shimizu

Electronic Properties of Improved Amorphous Silicon-Germanium Alloys Deposited by a Low Temperature Hot Wire Chemical Vapor Deposition Process A7.2
Shouvik Datta, J. David Cohen, Yueqin Xu, and A.H. Mahan

Experimental Study of Silane Plasma Nanoparticle Formation in Amorphous Silicon Thin Films A8.1
S. Thompson, C.R. Perrey, T.J. Belich, C. Blackwell, C.B. Carter, J. Kakalios, and U. Kortshagen

Study of the Oxidation of Polycrystalline SiGe: Formation of Ge Nanocrystals and Their Related Luminescence A8.3
A.C. Prieto, M. Avella, J. Jiménez, A. Rodríguez, J. Sangrador, T. Rodríguez, and A. Kling

Fabrication of One-Dimensional Silicon Nano-Wires Based on Proximity Effects of Electron-Beam Lithography A8.6
S.F. Hu and C.L. Sung

Charging Effect of a nc-Si in a SiO2 Layer Observed by Scanning Probe Microscopy A8.7
J.M. Son, J.M. Kim, Y. Khang, E.H. Lee, S.I. Park, Y.S. Kim, and C.J. Kang

Formation of Antimony 1D-Nanostructures on Si (5 5 12) Surface A8.8
S.M. Shivaprasad, Mahesh Kumar, Amish G. Joshi, and Vinod Kumar Paliwal

Fabrication of Silicon Nanowire Network in Aluminum Thin Films A8.9
Vincent H. Liu, Husam H. Abu-Safe, Hameed A. Naseem, and William D. Brown

Electrodeposition of Fluorescent Si Nanomaterial From Acidic Sodium Silicate Solutions A8.10
Laila H. Abuhassan and Munir H. Nayfeh

Hot-Mesh Chemical Vapor Deposition for 3C-SiC Growth on Si and SiO2 A8.11
Kanji Yasui, Jyunpei Eto, Yuzuru Narita, Masasuke Takata, and Tadashi Akahane

Advances in Amorphous Silicon Integrated Photonics Science and Technology A9.1
G.P. Halada, Samrat Chawda, J. Mawyin, R.J. Tonucci, A.H. Mahan, and C.M. Fortmann

Spectral Sensitivity and Color Selectivity in Multilayer Stacked Devices A9.2
P. Louro, M. Vieira, A. Fantoni, M. Fernandes, G. Lavareda, and C. Nunes de Carvalho

Application of SC-Simul for Numerical Modeling of the Opto-Electronic Properties of Heterojunction Diodes A9.3
R. Brüggemann, M. Rösch, S. Tardon, and G.H. Bauer

Two-Dimensional a-Si:H/a-SiC:H n-i-p Sensor Array With ITO/a-SiNx Antireflection Coating A9.4
Yu. Vygranenko, J. H. Chang, and A. Nathan

Amorphous Silicon Based p-i-i-n Structure for Color Sensor A9.5
S. Zhang, L. Raniero, E. Fortunato, L.Pereira, H. Águas, I. Ferreira, and R. Martins

Effect of the Hydrogen Content in the Optical Properties and Etching of Silicon Nitride Films Deposited by PECVD for Uncooled Microbolometers A9.6
R. Ambrosio, A. Torres, A. Kosarev, M. Landa, and A. Heredia

Photoluminescence and Electroluminescence Properties of FeSi2-Si Structures Formed by MEVVA Implantation A9.7
C.F. Chow, Y. Gao, S.P. Wong, N. Ke, Q. Li, W.Y. Cheung, G. Shao, M.A. Lourenco, and K.P. Homewood

Comparison of the Effect of Light Soaking in Porous Silicon and a-Si:H A9.8
N.P. Mandal and S.C. Agarwal

Nanocrystalline Germanium and Germanium Carbide Films and Devices A10.2
Xuejun Niu, Jeremy Booher, and Vikram L. Dalal

Influence of Pressure and Plasma Potential on High Growth Rate Microcrystalline Silicon Grown by VHF PECVD A10.3
A. Gordijn, J. Francke, L. Hodakova, J.K. Rath, and R.E.I. Schropp

'Seed Layers' for the Preparation of Hydrogenated Microcrystalline Silicon With Defined Structural Properties on Glass A10.4
Christoph Ross, Yaohua Mai, Reinhard Carius, and Friedhelm Finger

Solid Phase Crystallization of Hot-Wire CVD Amorphous Silicon Films A10.5
David L. Young, Paul Stradins, Eugene Iwaniczko, Bobby To, Bob Reedy, Yanfa Yan, Howard M. Branz, John Lohr, Manuel Alvarez, John Booske, Amy Marconnet, and Qi Wang

Low Substrate Temperature Deposition of Crystalline SiC Using HWCVD A10.6
S. Klein, R. Carius, L. Houben, and F. Finger

Improved Stability of Hydrogenated Amorphous Silicon Solar Cells Fabricated by Triode-Plasma CVD A11.1
H. Sonobe, A. Sato, T. Fujibayashi, S. Shimizu , T. Matsui, A. Matsuda, and M. Kondo

Highly and Rapidly Stabilized Protocrystalline Silicon Multilayer Solar Cells A11.2
Koeng Su Lim, Joong Hwan Kwak, Seong Won Kwon, and Seung Yeop Myong

Correlation Between Powder in the Plasma and Stability of High Rate Deposited a-Si:H A11.3
Guozhen Yue, Gautam Ganguly, Baojie Yan, Jeffrey Yang, and Subhendu Guha

The Nature of Native and Light Induced Defect States in i-Layers of High Quality a-Si:H Solar Cells Derived From Dark Forward-Bias Current-Voltage Characteristics A11.4
J. Deng, M.L. Albert, J.M. Pearce, R.W. Collins, and C.R. Wronski

New Light Trapping in Thin Film Solar Cells Using Textured Photonic Crystals A12.3
Lirong Zeng, Yasha Yi, Ching-yin Hong, Xiaoman Duan, and Lionel C. Kimerling

Effect of Fermi Level Position in Intrinsic a-Si:H on the Evolution of Defect States Under Light Exposure. A13.1
M. Zeman, V. Nádaždy, R. Durný, and J.W. Metselaar

The Creation and Annealing Kinetics of Fast Light Induced Defect States created by 1 Sun Illumination in a-Si:H A13.2
M.L. Albert, J. Deng, X. Niu, J.M. Pearce, R.W. Collins, and C.R. Wronski

Image and Color Sensitive Detector Based on Double p-i-n/p-i-n a-SiC:H Photodiode A13.4
M. Vieira, M. Fernandes, P. Louro, A. Fantoni, Y. Vygranenko,G. Lavareda, and C.N. Carvalho

Observation of a Hydrogen Doublet Site in High Defect Density As-Grown a-Si:H by 1H NMR A13.5
D. Bobela, T. Su, P. C. Taylor, and G. Ganguly

Light-Soaking Effects on the Open-Circuit Voltage of a-Si:H Solar Cells A13.6
Jianjun Liang, E.A. Schiff, S. Guha, B. Yan, and J. Yang

The Effects of Hydrogen Profiling and of Light-Induced Degradation on the Electronic Properties of Hydrogenated Nanocrystalline Silicon A13.7
A.F. Halverson, J.J. Gutierrez, J.D. Cohen, Baojie Yan, Jeffrey Yang, and Subhendu Guha

Application of Spectroscopic Ellipsometry and Infrared Spectroscopy for the Real-Time Control and Characterization of a-Si:H Growth in a-Si:H/c-Si Heterojunction Solar Cells A14.1
Hiroyuki Fujiwara and Michio Kondo

Real-Time Spectroscopic Ellipsometry as an In Situ Probe of the Growth Dynamics of Amorphous and Epitaxial Crystal Silicon for Photovoltaic Applications A14.2
D.H. Levi, C.W. Teplin, E. Iwaniczko, Y. Yan, T.H. Wang, and H.M. Branz

Novel In Situ and Real-Time Optical Probes to Detect (Surface) Defect States of a-Si:H A14.3
W.M.M. Kessels, I.M.P. Aarts, J.J.H. Gielis, J.P.M. Hoefnagels, and M.C.M. van de Sanden

Multiple-Trapping Model With Meyer-Neldel Effect and Field-Dependent Effects: Time-of-Flight Simulations for a-Si:H A15.2
Jesse Maassen, Arthur Yelon, Louis-André Hamel, and Wen Chao Chen

Computer Modelling of Non-Equilibrium Multiple-Trapping and Hopping Transport in Amorphous Semiconductors A15.3
C. Main, J.M. Marshall, S. Reynolds, M.J. Rose, and R. Brüggemann

Radiation Hard Amorphous Silicon Particle Sensors A15.4
N. Wyrsch, C. Miazza, S. Dunand, C. Ballif, A. Shah, M. Despeisse, D. Moraes, and P. Jarron

Low Temperature Thin-Film Silicon Diodes for Consumer Electronics A15.5
Qi Wang, Scott Ward, Anna Duda, Jian Hua, Paul Stradins, Richard S. Crandall, Howard M. Branz, Frank Jeffrey, Hao Lou, Craig Perlov, Warren Jackson, Ping Mei, and Carl Taussig

Effect of the Load Resistance in the Linearity and Sensitivity of MIS Position Sensitive Detectors A15.6
H. Águas, L. Pereira, L. Raniero E. Fortunato, and R. Martins

Real Time Monitoring of the Crystallization of Hydrogenated Amorphous Silicon A16.1
Paul Stradins, David Young, Howard M. Branz, Matthew Page, and Qi Wang

Development of Deposition Phase Diagrams for Thin Film Si:H and Si1-xGex:H Using Real Time Spectroscopic Ellipsometry A16.3
N.J. Podraza, G.M. Ferreira, C.R. Wronski, and R.W. Collins

Electrolyte-Gate a-Si:H Thin Film Transistors A17.4
Dina I. Gonçalves, Duarte M. Prazeres, Virginia Chu, and João P. Conde

High Electron Mobility (~150 cm2/Vs) PECVD Nanocrystalline Silicon Top-Gate TFTs at 260°C A17.5
Czang-Ho Lee, Andrei Sazonov, and Arokia Nathan

Threshold Voltage Optimization With Ion Shower Implantation for Polysilicon Thin-film Transistors A17.7
B.D. Choi, D.C. Choi, C.Y. Im, K.H. Choi, C.H. Yu, R. Kakkad, and H.K. Chung

Stark Splitting in Photoluminescence Spectra of Er in a-Si:H A18.1
Minoru Kumeda, Mitsuo Takahashi, Akiharu Morimoto, and Tatsuo Shimizu

PECVD Grown Hydrogenated Polymorphous Silicon Studied Using Current Transient Spectroscopies in PIN Diodes A18.2
Vibha Tripathi, Y.N. Mohapatra, and P. Roca i Cabarrocas

Characterization of Amorphous Silicon by Secondary Ion Mass Spectrometry A18.3
Yupu Li, Shaw Wang, Xue-Feng Lin, and Luncun Wei

AFM Morphology Study of Si1-yGey:H Films Deposited by LF PE CVD From Silane-Germane With Different Dilution A18.5
L. Sanchez, A.Kosarev, A.Torres, T.Felter, and A.Ilinskij

Optical Properties of Amorphous Silicon-Yttrium Films A18.7
Alexandra N. Shmyryeva and Tetyana V. Semikina

Fabrication of Nano-Crystalline Porous Silicon on Si Substrates by a Plasma Enhanced Hydrogenation Technique A19.1
Y. Abdi, P. Hashemi, F. Karbassian, F.D. Nayeri, A. Behnam, S. Mohajerzadeh, J. Koohsorhki, M.D. Robertson, and E. Arzi

CO2 Laser Annealing Synthesis of Silicon Nanocrystals Buried in Si-Rich SiO2 A19.2
Chun-Jung Lin, Yu-Lun Chueh, Li-Jen Chou, Hao-Chung Kuo, and Gong-Ru Lin

High Density Plasma Processing of Microcrystalline Si Thin Films A19.3
P.C. Joshi, A.T. Voutsas, and J.W. Hartzell

Crystallographic Study of the Initial Growth Region of µc-Si With Different Preferential Orientations A19.4
Y. Sobajima, T. Sugano, T. Kitagawa, T. Toyama, and H. Okamoto

Dependence of Microcrystalline Silicon Growth on Ion Flux at the Substrate Surface in a Saddle Field PECVD A19.6
Erik Johnson, Nazir P. Kherani, and Stefan Zukotynski

Growth of "New Form" of Polycrystalline Silicon Thin Films Synthesized by Hot Wire Chemical Vapor Deposition A19.8
A.R. Middya, J-J. Liang, and K. Ghosh

Nanocrystalline-Si Thin Film Deposited by Inductively Coupled Plasma Chemical Vapor Deposition (ICP-CVD) at 150°C A19.9
Sang-Myeon Han, Joong-Hyun Park, Hye-Jin Lee, Kwang-Sub Shin, and Min-Koo Han

Effects of N2O Fluence on the PECVD-Grown Si-Rich SiOx With Buried Si Nanocrystals A19.11
Chun-Jung Lin, Hao-Chung Kuo, Chia-Yang Chen, Yu-Lun Chueh, Li-Jen Chou, Chih-Wei Chang, Eric Wei-Guang Diau, and Gong-Ru Lin

Polycrystalline GeC Thin Films Deposited Using a Unique Hollow Cathode Sputtering Technique A20.2
R.J. Soukup, N.J. Ianno, J.S. Schrader, and V.L. Dalal

Improved Optical Loss Characteristics of PECVD Silicon Oxynitride Films Using Low Frequency Plasma A20.3
S. Naskar, C.A. Bower, S.D. Wolter, B.R. Stoner, and J.T. Glass

Nanocrystalline Si Films and Devices Produced Using Chemical Annealing with Helium A20.6
Nanlin Wang and Vikram L. Dalal

Use of Transparent Conductive Oxide Materials With Low Indices of Refraction in Amorphous Silicon-Based Solar Cell Technology A21.1
Scott J. Jones, Joachim Doehler, Tongyu Liu, David Tsu, Jeff Steele, Rey Capangpangan, and Masat Izu

Growth Chemistry of Nanocrystalline Si:H Films A21.4
Vikram L. Dalal, Kamal Muthukrishnan, Daniel Stieler, and Max Noack

Metal Induced Growth of Poly-Si Solar Cells and Silicide Nanowires by Use of Multiple Catalyst Layers A21.5
Joondong Kim, Chunhai Ji, and Wayne A. Anderson

Ultra-Shallow Junction Formation by a Non-Melting Process: Double-Pulsed Green Laser Annealing A21.7
Toshio Kudo, Susumu Sakuragi, and Kazunori Yamazaki

Temperature-Dependent Open-Circuit Voltage Measurements and Light-Soaking in Hydrogenated Amorphous Silcon Solar Cells A21.8
Jianjun Liang, E.A. Schiff, S. Guha, B. Yan, and J. Yang

Influence of Hydrogen Plasma on Electrical and Optical Properties of Transparent Conductive Oxides A21.10
L. Raniero, A. Gonçalves, A. Pimentel, I. Ferreira, S. Zhang, L. Pereira, H. Águas, E. Fortunato, and R. Martins

Gate Oxide Integrity for Polysilicon Thin-Film Transistors: A Comparative Study for ELC, MILC, and SPC Crystallized Active Polysilicon Layer A22.1
D.C. Choi, B.D. Choi, J.Y. Jung, H.H. Park, J.W. Seo, K.Y. Lee, and H.K. Chung

Low Temperature Metal-Free Fabrication of Polycrystalline Si and Ge TFTs by PECVD Hydrogenation A22.2
Pouya Hashemi, Jaber Derakhshandeh, Bahman Hekmatshoar, Shamsoddin Mohajerzadeh, Yaser Abdi, and Michael D. Robertson

Active Pixel TFT Arrays for Digital Fluoroscopy in a-Si:H Technology A22.4
Jackson Lai, Nader Safavian, Arokia Nathan, and John A. Rowlands

The Hysteresis Analysis of Hydrogenated Amorphous Silicon Thin Film Transistors for an Active Matrix Organic Light Emitting Diode A22.5
Jae-Hoon Lee, Bong-Hyun You, Kwang-Sub Shin, and Min-Koo Han

Low Hydrogen Concentration Silicon Nitride as a Gate Dielectric of TFTs for Flexible Display Application A22.6
Joong Hyun Park, Chang Yeon Kim, Kwang Sub Shin, Sang Geun Park, and Min Koo Han

Characterization of the Silicon-Based Thin Film Multi-Junction Solar Cells A23.1
Yoshihiro Hishikawa

High Efficiency Solar Cells With Intrinsic Microcrystalline Silicon Absorbers Deposited at High Rates by VHF-PECVD A23.2
Yaohua Mai, Stefan Klein, Reinhard Carius, Xinhua Geng, and Friedhelm Finger


Improved Back Reflector for High Efficiency Hydrogenated Amorphous and Nanocrystalline Silicon Based Solar Cells A23.3
Baojie Yan, Jessica M. Owens, Chun-Sheng Jiang, Jeffrey Yang, and Subhendu Guha

Bifacial Silicon Heterojunction Solar Cell With Deposited Back Surface Field A23.4
H.D. Goldbach, A. Bink, and R.E.I Schropp

High-Performance Amorphous Silicon Emitter for Crystalline Silicon Solar Cells A23.5
T.H. Wang, E. Iwaniczko, M.R. Page, Q. Wang, D.H. Levi, Y. Yan, Y. Xu, and H.M. Branz

Structure of Microcrystalline Solar Cell Materials: What Can We Learn From Electron Microscopy? A24.1
M. Luysberg and L. Houben

Structural and Electronic Properties of Hydrogenated Nanocrystalline Silicon Films Made with Hydrogen Dilution Profiling Technique A24.2

Keda Wang, Daxing Han, D. L. Williamson, Brittany Huie, J.R. Weinberg-Wolf, Baojie Yan, Jeffrey Yang, and Subhendu Guha

Microcrystalline and Nanocrystalline Silicon: Simulation of Material Properties A24.3
R. Biswas, B.C. Pan, and V. Selvaraj

Doping Dependence of Chlorine Incorporation in SiCl4-Based Microcrystalline Silicon Films A24.4
Wolfhard Beyer, Reinhard Carius, and Uwe Zastrow

Annealing Characteristics of Al-Doped Hydrogenated Microcrystalline Cubic Silicon Carbide Films A24.5
S. Miyajima, A. Yamada, and M. Konagai


 

 

 




 

 

 








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