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2003 FALL MEETING PROCEEDINGS

Symposium C
Ferroelectric Thin Films XII

Editors: Susanne Hoffmann-Eifert, Hiroshi Funakubo, Vikram Joshi, Angus I. Kingon, Ivo P. Koutsaroff,

MRS Proceedings Volume 784
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Stress Evolution in Integrated SrBi2Ta2O9 Ferroelectric Layers C1.2
J.G. Lisoni, K. Wafer, J.A. Johnson, L. Goux, M. Schwitters, V. Paraschiv, D. Maes, L. Haspeslagh, C. Caputa, R. Zambrano, and D.J. Wouters

Growth Model of Epitaxial Pb(Zr0.52Ti0.48)O3 Nanoislands C1.3
Ming-Wen Chu, Izabela Szafraniak, Roland Scholz, Dietrich Hesse, Marin Alexe, and Ulrich Gösele

Site Controlled Nucleation of Ferroelectric Crystals: A Step Towards Lithography Modulated Self-Assembly C1.6
P. Muralt, S. Bühlmann, and S. Von Allmen

Preparation and Characterization of Ferroelectric Bi3TiNbO9-Bi4Ti3O12 (m=2-3) Thin Films With Different Superlattice Structures C1.8
Akira Shibuya, Minoru Noda, and Masanori Okuyama

Nanoelectromechanics of Piezoresponse Force Microscopy: Contact Properties, Fields Below the Surface and Polarization Switching C2.6
S.V. Kalinin, Junsoo Shin, M. Kachanov, E. Karapetian, and A.P. Baddorf

A Transmission Electron Microscopy Study of Dislocation Substructures in PLD-Grown Epitaxial Films of (Ba,Sr)TiO3 on (001) LaAlO3 C2.7
I.B. Misirlioglu, A.L. Vasiliev, M. Aindow, R. Ramesh, and S.P. Alpay

Residual Stress Effects in Ferroelectric Thin Films C3.2
T.A. Berfield, N.R. Sottos, R.J. Ong, and D.A. Payne

Low Temperature Dielectric Properties of BST/ZrO2 Multilayer Films C3.7
Santosh K. Sahoo, D.C. Agrawal, S.B. Majumder, R.S. Katiyar, and Y.N. Mohapatra

Ferroelectric Domain Structure and Local Piezoelectric Properties of Sol-Gel Derived Pb(Zr1-xTix)O3 Films C3.10
I.K. Bdikin, V.V. Shvartsman, A.L. Kholkin, and Seung-Hyun Kim

Interface States of Laser Ablated BaTiO3 and Ba0.9Ca0.1TiO3 Thin Films in MFS Structure Determined by DLTS and C–V Technique C3.11
P. Victor, S. Saha, and S.B. Krupanidhi

First-Principles Study of the Electronic Structure of Pb(ZrTiNb)O3 (PZTN) Systems C3.12
Hiromu Miyazawa, Takamitsu Higuchi, Taku Aoyama, Takeshi Kijima, Eiji Natori, Tatsuya Shimoda, and Tamio Oguchi

Raman Spectra of Srm-3Bi4TimO3m+3 Thin Films C3.17
Jia Wang, Guangxu Cheng, Shantao Zhang, Hongwei Cheng, and Yanfeng Chen

Microstructure and Ferroelectric Behavior of Nano-Domains in Ultra-Thin BaTiO3 Films C3.18
Y. Drezner and S. Berger

High Pressure Deposition of Epitaxial PZT Thin Films on Sr(Nb)TiO3 C3.23
O. Blanco, J. Heiras, J.M. Siqueiros, E. Martínez, and E. Andrade

Compositionally Asymmetric Tri-Color Superlattices Grown by Pulsed Laser Deposition C3.24
H.N. Lee, H.M. Christen, C.M. Rouleau, S. Senz, S. K. Lee, D. Hesse, and D.H. Lowndes

Low Temperature Crystallization of Bismuth Layer-Structured Ferroelectric Thin Films Using Lead Titanate Sol-Gel Templating Technique and Their Electrical Properties C3.27
Junichi Karasawa, Takeshi Kijima, Eiji Natori, and Tatsuya Shimoda

Effect of Cationic Substitution on Raman Spectra of SrBi2Ta2O9 Ceramics and Thin Films C3.29
W. Perez, R.R. Das, P.S. Dobal, Y.I. Yuzyuk, P. Bhattacharya, and R.S. Katiyar

A Novel Iridium Precursor for MOCVD C3.30
Kazuhisa Kawano, Mayumi Takamori, Tetsu Yamakawa, Soichi Watari, Hironori Fujisawa, Masaru Shimizu, Hirohiko Niu, and Noriaki Oshima

Time-Domain Terahertz Spectroscopy of Strontium Bismuth Tantalate Thin Films C3.31
K. Kotani, M. Misra, I. Kawayam, and M. Tonouchi

Low-Temperature Synthesis and Dielectric Properties of Single-Phase Lead Zirconate Titanate Thin Film With a Nano Particle Seeding Technique C3.32
Tomokazu Tanase, Yoshio Kobayashi, Takao Miwa, and Mikio Konno

Liquid Injection MOCVD and ALD Studies of “Single Source” Sr-Nb and Sr-Ta Precursors C4.1
Richard J. Potter, Paul A. Marshall, John L. Roberts, Anthony C. Jones, Paul R. Chalker, Marko Vehkamäki, Mikko Ritala, Markku Leskelä, Paul A. Williams, Hywel O. Davies, Neil L. Tobin, and Lesley M. Smith

Effect of Thermal Strain on Domain Fraction in a-/b-Axis-Oriented Epitaxial Bi4Ti3O12 Films C4.2
Takayuki Watanabe, Hitoshi Morioka, Shoji Okamoto, Masatake Takahashi, Yuji Noguchi, Masaru Miyayama, and Hiroshi Funakubo

Property Improvement of MOCVD-PZT Films Deposited Below 400°C C4.3
Hiroshi Funakubo, Gouji Asano, Atsushi Nagai, Hitoshi Morioka, Shintaro Yokoyama, Tetsuo Shibutami, Noriaki Oshima, and Kensuke Akiyama

TEM and Electrical Analysis of Sputtered Barium Strontium Titanate (BST) Thin Films on Flexible Copper Substrates C5.3
Brian Laughlin, Jon Ihlefeld, and Jon-Paul Maria

Microwave Measurements of Ferroelectric Thin Films: Techniques, Error and Limitations C5.5
Peter Kr. Petrov

Enhanced Dielectric Properties o Compositionally Modified BST Based Thin Films fr Voltage Tunable Microwave Devices C5.6
M.W. Cole, W.D. Nothwang, C. Hubbard, E. Ngo, and M. Ervin

Microwave Properties of Parallel Plate Capacitors Based on (Ba,Sr)TiO3 Thin Films Grown on SiO2/Al2O3 Substrates C5.8
I.P. Koutsaroff, T. Bernacki, M. Zelner, A. Cervin-Lawry, A. Kassam, P. Woo, L. Woodward, and A. Patel

Thickness and Strain Effects on RF/Microwave Properties of BST Thin Films on NdGaO3 Substrates C5.9
William Kurt Simon, E. Koray Akdogan, Jeffery Bellotti, and Ahmad Safari

Fabrication and Electrical Characterization of Ba(1-x)SrxTiO3 Based Thin Films C5.10
E. Ngo, W.D. Nothwang, C. Hubbard, M.W. Cole, W. Chang, S.W. Kirchoffer, and J.M. Pond

Property Design of SrBi2Ta2O9 by Defect Engineering C6.1
Yuji Noguchi and Masaru Miyayama

Growth of Epitaxial Tetragonal Pb(Zr,Ti)O3 Thin Films With 100% Polar-Axis-Orientation and Their Electrical Properties C6.2
Hitoshi Morioka, Shintaro Yokoyama, Takahiro Oikawa, Keisuke Saito, and Hiroshi Funakubo

Synchrotron X-ray Microdiffraction Images of Polarization Switching in Epitaxial PZT Capacitors with Pt and SrRuO3 Top Electrodes C6.4
Dal-Hyun Do, Dong Min Kim, Chang-Beom Eom, Eric M. Dufresne, Eric D. Isaacs, and Paul G. Evans

Polarization Reversal Model and Prediction of Temperature-Dependent Switching of Ferroelectric Capacitors C6.7
Igor Stolichnov, Alexander K. Tagantsev, Nava Setter, and Jeffrey S. Cross

Polarization Reversal Anti-Parallel to the Applied Electric Field Observed Using a Scanning Nonlinear Dielectric Microscopy C6.9
Takeshi Morita and Yasuo Cho

Effective Orientation Control of Pb(Zr0.4Ti0.6)O3 Thin Films Using a New Ti/Pb(Zr0.4Ti0.6)O3 Seeding Layer C7.5
B.K. Moon, O. Arisumi, K. Hornik, R. Bruchhaus, H. Itokawa, A. Hilliger, H. Zhuang, U. Egger, K. Nakazawa, S. Yamazaki, T. Ozaki, N. Nagel, I. Kunishima, K. Yamakawa, and G. Beitel

Low Voltage Operation of PZT Ferroelectric Film deposited by Liquid Source MOCVD C7.6
Yutaka Nishioka, Takeshi Masuda, Masahiko Kajinuma, Takakazu Yamada, Masaki Uematsu, and Koukou Suu

Fabrication of Ru/Bi4-xLaxTi3O12/Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition C7.7
Taisuke Furukawa, Takeharu Kuroiwa, Yoshihisa Fujisaki, Takehiko Sato, and Hiroshi Ishiwara

RF Magnetron Sputtering Process for (Ba,Sr)TiO3 Thin Films With Higher Dielectric Constant C7.8
T. Jimbo, I. Kimura, Y. Nishioka, and K. Suu

Measuring Residual Stress Effects of Acceptor Doping In Tunable Microwave Dielectric Thin Films C8.1
W.D. Nothwang, M.W. Cole, C. Hubbard, and E. Ngo

Temperature Dependent Raman Scattering and Dielectric Permittivity Measurements of Pb1-xSrxTiO3 Films C8.3
V.M. Naik, M. Smith, H. Dai, P. Talagala, R. Naik, G.W. Auner, and J. Mantese

Conduction and Microwave Loss Mechanisms in Ba0.25Sr0.75TiO3 Films C8.7
Andrei Vorobiev, Par Rundqvist, Khaled Khamchane, and Spartak Gevorgian

Ferroelectric Films and Multilayers with Ultrahigh Dielectric Constants C8.9
Kewen Li, Kevin Zou, Yanyun Wang, Hua Jiang, and Xuesheng Chen

Single- and Multi-Target Pulsed Laser Deposition of Thin BSTO Films: Preparation, Microstructure and Electrical Properties C8.14
Kumaravinothan Sarma, Peter Kr. Petrov, and Neil McN. Alford

Low Temperature Deposition of Ba0.96Ca0.04Ti0.84Zr0.16O3 Thin Films on Pt Electrodes by RF Magnetron Sputtering C8.15
N. Cramer, Elliot Philofsky, Lee Kammerdiner, and T.S. Kalkur

Dielectric and Ferroelectric Properties of Modified BiFeO3-PbTiO3 Thin Films Derived From Sol-Gel Processing C8.16
JinRong Cheng and L.Eric Cross

Microstructural and Electrical Characterization of (Ba,Sr)TiO3 Thin Films Prepared by a New Carboxylate Free Chemical Solution Deposition (CSD) Route C8.17
Sandip Halder, Theodor Schne
ller, and Rainer Waser

Comparative Studies on BaZrxTi1-xO3 Thin Films Deposited by Sol-Gel and Pulse Laser Deposition C8.18
A. Dixit, P.Bhattacharaya, S.B. Majumder, and R.S. Katiyar

Growth and Study of BaZrO3 Thin Films by Pulsed Excimer Laser Ablation C8.19
V. Rajasekarakumar, P. Victor, R. Ranjith S. Saha, S. Rajagopalan, A.K. Tyagi, and S.B. Krupanidhi

Enhancing Tunability and Decreasing Temperature Sensitivity C8.20
S.C. Tidrow, A. Tauber, D.M. Potrepka, F. Crowne, and B. Rod

Electrode Effect on Microwave Properties of Ferroelectric (BaxSr1-x)TiO3 Thin Films C8.23
Won-Jeong Kim, Sang-Su Kim, Tae-Kwon Song, Seung Eon Moon, Eun-Kyoung Kim, Min-Hwan Kwak, Seok-Kil Han, Young-Tae Kim, Han-Cheol Ryu, and Su-Jae Lee

Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors C9.2/E9.2
Paul A. Williams, Anthony C. Jones, Helen C. Aspinall, Jeffrey M. Gaskell, Paul R. Chalker, Paul A. Marshall, Yim F. Loo, and Lesley M. Smith

Long Retention Performance of a MFIS Device Achieved by Introducing High-k Al2O3/Si3N4/Si Buffer Layer C9.6/E9.6
Yoshihisa Fujisaki1, Kunie Iseki, and Hiroshi Ishiwara

Investigation of Retention Properties for YMnO3 Based Metal/Ferroelectric/Insulator/Semiconductor Capacitors C9.7/E9.7
T. Yoshimura, D. Ito, H. Sakata, N. Shigemitsu, K. Haratake, A. Ashida, and N. Fujimura

Characterization of Metal-Ferroelectric-Metal-Insulator-Semiconductor (MFMIS) FETs Using (Sr,Sm)0.8Bi2.2Ta2O9 (SSBT) Thin Films C9.8/E9.8
Hirokazu Saiki and Eisuke Tokumitsu

Selective Deposition of C-axis Oriented Pb5Ge3O11 on the Patterned High k Gate Oxide by MOCVD Processes C9.9/E9.9
Tingkai Li, Sheng Teng Hsu, Bruce Ulrich, and Dave Evans

Ferro- and Piezoelectric Properties of Bi4-xPrxTi3O12 Polycrystalline Thick Films With Ps-Vector Orientation C10.1
Hirofumi Matsuda, Sachiko Ito, and Takashi Iijima

Shape of Piezoelectric Hysteresis Loop for Non-Ferroelastic Switching C10.6
A.K. Tagantsev, P. Muralt, and J. Fousek

Direct-Write E-Beam Submicron Domain Engineering in LiNbO3 Thin Films Grown by Liquid Phase Epitaxy C10.8
Ji-Won Son, Yin Yuen, Sergei S. Orlov, Bill Phillips, Ludwig Galambos, Vladimir Ya. Shur, and Lambertus Hesselink

Pyroelectric Properties of Ferroelectric Thin Films: Effect of Internal Stresses C10.9
A. Sharma, Z.-G. Ban, and S.P. Alpay

Crystallization of Sub-100 nm-Thick Bi4-xLaxTi3O12 Films on Silicon Substrates and Their Electrical Properties C11.2
Atsushi Kohno, Fumitake Ishitsu, Kazuhiro Matuo, and Hiroyuki Tomari

Frequency-Dependent Electromechanical Response in Ferroelectric Materials Measured via Piezoresponse Force Microscopy C11.3
I.K. Bdikin, V.V. Shvartsman, S-H. Kim, J. Manuel Herrero, and A.L. Kholkin

Ti-Site Substitution Using the Higher-Valent Cation for Enhancing the Ferroelectric Properties of Nd3+-Substituted Bismuth Titanate Thin Films C11.8
Hiroshi Uchida, Seiichiro Koda, Hirofumi Matsuda, Takashi Iijima, Takayuki Watanabe, and Hiroshi Funakubo

Preparation, Microstructure and Physical Characteristics of Ferroelectric Pb5Ge3O11 Thin Films for Memory Application C11.9
Y.X. Liu, C. Caragianis-Broadbridge, A.H. Lehman, J. McGuinness, and T.P. Ma

Ferroelectric Memory in La Substituted Bi4Ti3O12 Thin Films C11.11
R.E. Melgarejo and M.S. Tomar

Structural and Electrical Investigations of Ferroelectric Lead Strontium Titanate Thin Films and Ceramics C11.15
M. Jain, P. Bhattacharya, Yu.I. Yuzyuk, R.S. Katiyar, and A.S. Bhalla

Deposition of BaTiO3 Thin Films and MgO Buffer Layers on Patterned GaAs Substrates For Integrated Optics Applications C11.23
Ding-Yuan Chen, Timothy E. Murphy, and Jamie D. Phillips

Parametric Studies on Suppression of Secondary Phases in LiNbO3 Thin Films Deposited by Pulsed Laser Deposition C11.24
Ji-Won Son, Sergei S. Orlov, Bill Phillips, and Lambertus Hesselink

PZT Thick Films Deposited by Improved Hydrothermal Method for Thickness Mode Ultrasonic Transducer C11.27
Mutsuo Ishikawa, Minoru Kurosawa, Naoki Katsura, and Shinichi Takeuchi

Mist Deposition of Micron-Thick Lead Zirconate Titanate Films C11.28
Mark D. Losego and Susan Trolier-McKinstry

Sample Geometry Effects on Electric-Field-Induced Displacements in Piezoelectric Thin Films Measured by Atomic Force Microscopy C11.29
Hirotake Okino, Hirofumi Matsuda, Takashi Iijima, Shintaro Yokoyama, Hiroshi Funakubo, and Takashi Yamamoto

The Synthesis and Structure of New Perovskite-type Niobate Processed in Millimeter Wave Field C11.30
Hanxing Liu, Long Zou, Jian Zhou, Guangjiang Yuan, Hua Hua, Dabing Luo, Jirun Luo, and Shixi Ouyang

Ferroelectric Property of an Epitaxial Lead Zirconate Titanate Thin Film Deposited by a Hydrothermal Method C11.31
Takeshi Morita, Yasuo Wagatsuma, Yasuo Cho, Hitoshi Morioka, Hiroshi Funakubo, and Setter Nava

Local Hysteresis Behavior of Ferroelectric Thin Films of Si Added PbTiO3 C11.32
V.R. Palkar, M. Higgins, S.C. Purandare, R. Pinto, and S. Bhattacharya

An Effective Way to Suppress the Pyrochlore Phase Formation in SBT Thin Films C11.33
Se-Yeon Jung, Woo-Chul Kwak, Seung-Joon Hwang, and Yun-Mo Sung

Growth Reorientation With the Annealing Temperature of SrBi2Ta2O9 Films Deposited by PLD C11.34
Ma.P. Cruz, Jorge J. Portelles, and Jesús M. Siqueiros

Lead Deficient PST Thin Films on LSCO/SrTiO3 by RF-Sputtering C11.35
E. Martínez, O. Blanco, A.Fundora, and J.M. Siqueiros

Comparison of Titanium Precursors in the Sol-Gel Synthesis of Pb0.5Ba0.5TiO3 Powders and Thin Films C11.36
Stacey W. Boland and Sossina M. Haile

Ir Thin Films for PZT Capacitors Prepared by MOCVD Using a New Ir Precursor C11.37
H. Fujisawa, S. Watari, M. Shimizu, H. Niu, and N. Oshima

Polarization Enhancement of Nd-Modified Bismuth Titanate Prepared by Pulsed Laser Deposition at Low Temperature C11.39
Wenbiao Wu, Akira Shibuya, Minoru Noda, and Masanori Okuyama

Hydrothermally Deposited PZT Thin Films With Vertically Oriented Columnar Growth C11.40
Scott Solberg, Alexandra Rodkin, Baomin Xu, and Karl Littau

Laser Annealing of Ferroelectric SrBi2Ta2O9, Pb(ZrXTi1-X)O3 and CeMnO3 Thin Films C11.43
N.M. Sbrockey, J.D. Cuchiaro, L.G. Provost, C.E. Rice, S. Sun, G.S. Tompa, R.L. DeLeon, and T.S. Kalkur

Preparation and Characterization of Ba1-xSrxTiO3 Based Thin Films for Pyroelectric Applications C11.46
C.W. Hubbard, M.W.Cole, M. Ervin, and M. Wood

MOCVD of Ferroelectric Thin Films C11.47
C.E. Rice, S. Sun, J.D. Cuchiaro, L.G. Provost, and G.S. Tompa

Effect of Deposition Parameters on the Microstructural Evolution and Electrical Properties of Charge-Balanced Barium Strontium Titanate Ferroelectric Thin Films Deposited on Ceramic Substrates by Pulsed Laser Deposition C11.48
Costas G. Fountzoulas, Steven C. Tidrow, Michael Hatzistergos, and Harry Efstathiadis

Ferroelectric and Ferromagnetic Properties of BiFeO3 Thin Films Deposited by Pulsed Laser Deposition C11.52
Kwi-Young Yun, Minoru Noda, Masanori Okuyama, Hiromasa Saeki, and Hitoshi Tabata

Enhancement of Aurivillius Phase Formation Kinetics in SBT Thin Films Using Nanoparticle Seeding C11.55
Yun-Mo Sung, Woo-Chul Kwak, Se-Yon Jung, and Seung-Joon Hwang

First Prototype of High-Density Ferroelectric Data Storage System C11.58
Yoshiomi Hiranaga, Yasuo Cho, and Yasuo Wagatsuma

Simulation of Phonon-Polariton Generation and Propagation in Ferroelectric LiNbO3 Crystals C11.60
David W. Ward, Eric Statz, Nikolay Stoyanov, and Keith A. Nelson



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