Volume 26, No. 4
April 2001
A Publication of the Materials Research Society
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© Copyright 2001
Materials Research Society
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MICROELECTROMECHANICAL SYSTEMS: TECHNOLOGY
AND APPLICATIONS
Microelectromechanical
Systems: Technology and Applications,
282
D. Bishop, A. Heuer, and D. Williams, Guest Editors
Surface Micromachining: A Brief Introduction,
289
M. Mehregany and C.A. Zorman
Integrated MEMS Technology, 291
A.E. Franke, T.J. King and R.T. Howe
Designing for MEMS Reliability, 296
S. Arney
On-Chip Testng of Mechanical Properties of
MEMS Devices, 300
H. Kahn, A.H. Heuer, and R. Ballarini
Tribology of MEMS, 302
M.P. de Boer and T.M. Mayer
Measuring Motions of MEMS, 305
D.M. Freeman
High-Aspect-Ratio Structures for MEMS, 307
S.W. Pang
Diamond and Amorphous Carbon MEMS, 309
J.P. Sullivan, T.A. Friedmann, and K. Hjort
Microsystems Technology (MST) and MEMS Applications:
An Overview, 312
J. Elders, V. Spiering, and S. Walsh
Defense Applications of MEMS, 318
W.C. Tang and A.P. Lee
A "Silicon Eye" Using MEMS Micromirrors,
320
N. Clark
The DMD™ Projection Display Chip: A
MEMS-Based Technology, 325
L.J. Hornbeck
MEMS for LIght-Wave Networks, 328
C.R. Giles, D. Bishop, and V. Aksyuk
Micromachining for rf Communications, 331
D.J. Young
Microsystems for Chemical and Biological Applications,
333
D. Lindner
LIGA Technologies and Applications, 337
J. Hruby
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MRS NEWS
Alan I. Taub Receives 2000 Woody Award, 343
MRS Invites Nominations for the Von Hippel Award, Turnbull Lectureship, and MRS Medal, 343
ABSTRACTS
Abstracts for May 2001 Journal of Materials Research, 344
DEPARTMENTS
Research/Researchers, 275
Washington News, 280
Resources,
281
Advertisers
in This Issue, 301
Classified, 348
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ON THE COVER: Microelectromechanical Systems (MEMS): Technology and Applications. Shown is an electrostatically actuated comb drive fabricated from amorphous diamond. Inset, lower left: detail of the amorphous diamond electrostatic fingers and spring. Background: a polycrystalline diamond Fresnel lens for applications in high-power diffractive optics. See the technical theme that begins on page 282.
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