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Venue San Francisco Marriott April 5-6, 2002 Organizers Ainissa G. Ramirez Lucent Technologies / Agere Systems E-mail: ramirez@stanfordalumni.org Richard P. Vinci Lehigh University Workshop Registration This workshop follows the 2002 MRS Spring Meeting. Save by registering for both meetings!

Submit Poster Abstracts to Ainissa Ramirez Deadline Extended to March 8: ramirez@stanfordalumni.org A poster session will be held on Saturday evening at the MEMS Workshop. This session will present an excellent opportunity for significant discussion among the participants. We encourage all attendees to submit one or more posters and to join in a lively exchange of ideas. Subscribe to our e-mail list to receive automatic updates on this event

This workshop will focus on materials issues and opportunities in MEMS through in-depth presentations and discussions among researchers, academicians and engineers from around the world. The MEMS community is heavily driven by the push for products, yet these thrusts may overlook underlying concern with materials properties, behavior and reliability. Take a brief pause from the meteoric rise of this technology to discuss and learn about the science and engineering of materials on the small scale. Registration Includes: Workshop Participation Reception 1 Breakfast - 1 Lunch - 1 Dinner - Daily Coffee Breaks

Friday, April 5th
6:00-7:00 pm		Reception
Session 1: Overview and Process
7:00-8:00 pm	Stuart Brown, Exponent	MEMS Overview
8:00-8:30 pm	Roya Maboudian, University of California-Berkeley	Surface Engineering for Reliable MEMS Device Operation
Saturday, April 6th
8:30-9:30 am		Breakfast
Session 2: MEMS Materials
9:30-10:00 am	Thomas Friedmann, Sandia National Laboratories	Diamond-like Carbon for MEMS
10:00-10:30 am	Arthur Heuer, Case Western Reserve University	NiTi Alloys for MEMS Structures
10:30-11:00 am		Break
11:00-11:30 am	Susan Trolier-McKinstry, Pennsylvania State University	Piezoelectric MEMS
11:30 am-12:00	Arthur Heuer, Case Western Reserve University	Multilayer Polysilicon Materials
12:00-1:30 pm		Lunch
Session 3: Beyond Microelectronics
1:30-2:00 pm	Jack Judy, UCLA	Magnetic Materials for MEMS
2:00-2:30 pm	Winston (Wolé) Soboyejo, Princeton University	Bio-MEMS Materials
2:30-3:00 pm	Herb Shea, Bell Labs/Lucent Technologies	Optical MEMS Reliability
3:00-3:30 pm		Break
Session 4: MEMS Testing
3:30-4:00 pm	David LaVan, Massachusetts Institute of Technology	MEMS-Based Testing Techniques
4:00-4:30 pm	Hoo-Jeong Lee, Agere Systems	Tensile Tests and TEM of Free-Standing Al Beam
4:30-5:00 pm	Oliver Kraft, Max Planck Institute	Mechanical Fatigue in Thin Metal Films on Substrates
5:00-6:00 pm		Poster Session
6:00-7:30 pm		Dinner
7:30-9:00 pm		Panel Discussion-Future Directions Final Words
9:00 pm		Adjourn

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