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Home Meetings Workshops
2001 Workshops
Note: Travel Discounts
for the Workshops !
| International Workshop on Device
Technology |
| September 3-5, 2001 in
Brazil |
WORKSHOP
WEB-SITE
Chair: Israel Baumvol, Instituto de Fisica-UFRGS
This workshop will focus on different aspects of electrical,
structural and physico-chemical characterization of alternative
oxide materials--the so-called high-K dielectrics that are being
considered as replacements for SiO2, the gate dielectrics
in ULSI devices. Developments in sub-2 nm oxide and oxynitride
gate dielectrics and the emerging field of oxide and oxynitride
films on SiC will also be explored. Don't miss this third workshop
in the bi-annual international workshop series.
Topics will include
- Electrical characterization of MOS structures
using novel high-K oxides on Si
- Deposition and growth methods of high-K gate
dielectrics on Si
- Atomic scale understanding of thin and ultrathin
films of high-K oxides and their interface with Si
- Electrical characterization and atomic scale
understanding of stability and post-deposition annealing of high-K
materials on Si
- Growth, deposition and atomic scale characterization
of sub-nanometric silicon nitride, oxide and oxynitride films
as intermediate layers between high-K oxides and Si substrates
- State-of-the-art on growth and electrical
and physico-chemical characterization of sub-2 nm silicon oxide
and oxynitride films of Si
- Electrical characterization and atomic scale
understanding of oxide and oxynitride films on SiC
VARIG Brazilian Airlines is providing up to a 25% discount to attendees from
applicable published fares for travel to our conference. This
discount is available from your origin city in the USA connecting
with VARIG flights in New York (JFK), Los Angeles (LAX), and
Miami (MIA). The discount does not apply to code share flights
- series numbers 7000.
Please call VARIG reservations at 800-223-5850
between 9:00 A.M. and 8:00 P.M, Monday through Friday, to book
your reservations and receive your travel discount.
Tickets will be forwaded by VARIG's "TBM" Department.
Please refer to CODE: MRS 0901
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