This symposium is the latest in a continuing series on Rapid Thermal Processing (RTP) and related topics. The program will address recent work in traditional RTP processes, such as dielectric growth, annealing and silicides, as well as developments in integrated processes. Papers are sought in the area of the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis will be placed on process and equipment modeling and the critical aspects of RTP, such as temperature measurement and control and temperature uniformity.
Papers, both oral and poster, are solicited in the following areas:
* RTCVD of single crystal, polycrystalline and amorphous silicon and SiGe Alloys
* Rapid thermal oxidation, engineered dielectrics (ONO) and deposited dielectrics, such as for gate stack structures
* Silicides and diffusion barriers, such as TiN
* Glass reflow and other RT processes
* Rapid thermal annealing - device implications and requirements, theoretical aspects (diffusion modeling, etc.)
* Integrated processing ("cluster tools") - in-situ cleaning, throughput issues, economic issues, multi-step fabrication schemes and technical advantages
* Equipment Issues - temperature measurement and control, uniformity, equipment modeling, manufacturing, maintenance and cost issues
* RTP of flat panal displays
* RTP of compound semiconductors
In addition to the abstract, a two-page (maximum) summary, including data (figures), is required to assist in the selection of papers.
Partial list of invited speakers: R. van de Leest (Philips Research), UV Photo-Annealing and RTP of Thin Sol-Gel (Ta205, etc.) Films; S.C. Sun (Nano Device Lab, Hsinchu, Taiwan); RTCVD of Doped Poly-Si
Yes, Tell Me How To Submit an Abstract
Symposium Organizers
Jeffrey C. Gelpey
AST Elektronik USA, Inc.
P.O. Box 3482
Lynnfield, MA 01940
Phone (617) 334-6634
Fax (617) 334-3566
Randhir P.S. Thakur
Micron Technology, Inc.
2805 East Columbia Rd./MS 560
Boise, ID 83706
Phone (208) 368-3389
Fax (208) 368-2548
rthakur@vax.micron.com
Mehmet Öztürk
Department of Electrical and
Computer Engineering
North Carolina State University
Box 7911
Raleigh, NC 27695-7911
Phone (919) 515-5245
Fax (919) 515-3027
Anthony Fiory
AT&T Bell Laboratories
P.O. Box 636 - Rm. 1D468
Murray Hill, NJ 07974-0636
Phone (908) 582-6102
Fax (908) 582-4228
Fred Roozeboom
Philips Research
WA 12
Prof. Holstlaan 4
5656 AA Eindhoven
The Netherlands
Phone (31) 40-742767
Fax (31) 40-744282
roozeboo@prl.philips.nl
|
Home •
News •
Society Information •
What's New •
Site Map •
Comments •
Search Contacts • MRS Meetings • Membership • MRS Publications • Marketing Opportunities
|
