Chairs
| David LaVan |
|
Yale University |
| Mark McNie |
|
QinetiQ Ltd. |
| Somuri Prasad |
|
Sandia National Laboratories |
| Cengiz S. Ozkan |
|
University of California-Riverside |
Proceedings
to be published online
(see ONLINE PUBLICATIONS at www.mrs.org)
as volume 872E
of the Materials Research Society
Symposium Proceedings Series.
This volume may be published in print format after the
meeting.
* Invited paper
TUTORIAL
BioMEMS--Materials, Fabrication, and Devices
Monday March 28, 2005
8:30 AM - 12:00 Noon
Room 2003 (Moscone West)
Micro and nanofabrication techniques are increasingly be employed in the development of biosensors, in fundamental biological studies, and in tissue engineering. This broad field of research, which is quickly expanding, is commonly referred to as bioMEMS. In this tutorial, the basic fabrication techniques commonly used in bioMEMS will be reviewed, promising devices highlighted, and the development and processing of new materials for sensor and tissue engineering applications described.
The tutorial will begin with an overview of the fabrication technologies typically used in the construction of bioMEMS. While this will include a brief summary of traditional technologies, such as surface and bulk micromaching, an emphasis will be placed on methods for fabricating polymer microsystems and patterning cellular materials. The second section of the tutorial will highlight work in area of devices. Numerous biosensors and systems have been developed for a range of applications from protein and DNA detection to drug delivery. Several promising devices will be discussed in terms of their application, operating principle, and fabrication process. The final section of the symposium will cover the development and selection of materials for bioMEMS. This section will provide an overview of the important characteristics of materials for applications in this area and will review recent efforts aimed at developing materials for sensor and tissue engineering applications.
Instructors:
Rashid Bashir, Purdue University
Kevin Turner, Massachusetts Institute of Technology
David A. LaVan, Yale University
SESSION J1: Metrology and Materials Characterization
Chair: Somuri Prasad
Monday Afternoon, March 28, 2005
Room 2003 (Moscone West)
1:30 PM *J1.1
Application of FIB and EBSD to Characterize MEMS Materials
and Devices. Joseph R. Michael, Somuri V. Prasad and Brad L. Boyce; Sandia National Laboratories, Albuquerque, New Mexico.
2:00 PM J1.2
Electrical Characteristics of 1T/1R RRAM Device Using ZrOx. Hyejung
Choi, Dongsoo Lee, Yunik Son and Hyunsang Hwang; Department
of Materials Science and Engineering, Gwangju Institute of
Science and Technology, Gwangju, South Korea.
2:15 PM J1.3
Modification of Deposition Process of Piezoelectric Polycrystalline
Film by Hydrothermal Method - Improvement of the Deposition
Process by Pre-Treatment Using Hydorgen Peroxide. Akito Endo1, Norimichi Kawasima1, Shinich Takeuchi1, Mutsuo Ishikawa2, and Minoru Kurosawa2. 1Department of Biomedical Engineering, Toin University of Yokohama, Yokohama, Japan; 2Tokyo Insitute of Technology University, Yokohama, Japan.
2:30 PM J1.4
Micromirror Arrays for High Temperature Operation. Mahmoud Fuad Almasri and A. Bruno Frazier; Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia.
2:45 PM J1.5
Recent Development of the Surface Nanocrystallization by SMAT (Surface Mechanical Attrition) and the Effect on the Mechanical Behavior. Jian Lu1 and Ke Lu2; 1LASMIS, Mech. Syst. Engg, UTT, Troyes, France; 2SYNL, Institute of Metal Reserach CAS, Shenyang, China.
3:00 PM BREAK
SESSION J2: Surfaces and Interfaces
Chair: Cengiz S. Ozkan
Monday Afternoon, March 28, 2005
Room 2003 (Moscone West)
3:30 PM *J2.1
Electrodeposition of High Aspect Ratio Microstructures Through Thick Resist. James Kelly, Steve Goods and Alec Talin; Sandia Natl Labs, Livermore, California.
4:00 PM J2.2
Anchoring of Organic Molecules on Cu(001) Surface Through
S-Headgroup. Patrizia Monachesi1, Letizia Chiodo2, Fabio Bussolotti3, Maria Grazia Betti4 and Carlo Mariani5; 1Dipartimento di Fisica, Universita' dell'Aquila and INFM, L'Aquila, Italy; 2Dipartimento di Fisica, Universita' di Roma "Tor Vergata" and INFM, Roma, Italy; 3Dipartimento di Fisica, Universita' di Modena and INFM CRS-S3, Modena, Italy; 4Dipartimento di Fisica, Universita' di Roma "La Sapienza" and INFM CRS-SOFT, Roma, Italy; 5Dipartimento di Fisica, Universita' di Roma "La Sapienza" and INFM CRS-S3, Roma, Italy.
4:15 PM J2.3
In-Situ Pretreament Approach for Surface Deterioration Alleviation Amidst Thermal Desorption of Si (100). Arthur Pun1, Xu Wang1, Jamie Meeks1, Steve Durbin2 and Jim Zheng1; 1Electrical and Computer Engineering, FAMU-FSU College of Engineering, Tallahassee, Florida; 2MacDiarmid Institute for Advanced Materials and Nanotechnology, University of Canterbury, Christchurch, New Zealand.
4:30 PM J2.4
Interface Phenomena in MEMS Switches and Relays. Lior Kogut and Kyriakos Komvopoulos; Department of Mechanical Engineering, University of California at Berkeley, Berkeley, California.
4:45 PM J2.5
Crystallization of Amorphous Sputtered NiTi Thin Films. Ainissa
G. Ramirez, Hoo-Jeong Lee, Hai Ni and David T. Wu; Mechanical
Engineering, Yale University, New Haven, Connecticut.
SESSION J3: Reliability and Packaging
Chair: Roya Maboudian
Tuesday Morning, March 29, 2005
Room 2003 (Moscone West)
8:30 AM J3.1
A Detailed Study of Hydrogen Annealing Process Effects on Silicon (011) Nano Structures. Rownak Jyoti Zaman1, Weize Xiong2, Andrea Franke1, Rudy Quintilla1, Nirmal Chaudhury3, Thomas Schultz3, Rinn Cleavelin2, Rick Wise2, Mike Pas2, Shaofeng Yu2, Klaus Schruefer3 and Sanjay K. Banerjee4; 1ATDF, Inc, Austin, Texas; 2SiTD, Texas Instruments Inc, Dallas, Texas; 3Infineon Technologies, Munchen, Germany; 4University of Texas at Austin, Austin, Texas.
8:45 AM J3.2
Layer-by-Layer Metallic and Ceramic Photonic Crystals Fabricated
by Soft Lithography for Optical Regime. Jae-Hwang Lee1,3,
Chang-Hwan Kim1,3, Yong-Sung Kim1,3,
Henry Kang2,3, Wai Leung3, Rana Biswas1,3,
Cha-Hwan Oh4, Kristen Constant2,3 and
Kai-Ming Ho1,3; 1Department of Physics
and Astronomy, Iowa State University, Ames, Iowa; 2Department
of Material Science and Engineering, Iowa State University,
Ames, Iowa; 3Ames Laboratory DOE, Ames, Iowa; 4Department
of Physics, Hanyang University, Seoul, South Korea.
9:00 AM J3.3
Temperature and Solution pH Effects on Cohesive and Adhesive
Fracture of Silica/Adhesive/Polyimide Thin Film Systems. Louise
Y. Wang and Reinhold H. Dauskardt; Materials Science and
Engineering, Stanford University, Stanford, California.
9:15 AM J3.4
Detection of Residual Stress in Silicon Carbide MEMS by μ-Raman
Spectroscopy. John C. Zingarelli1, Michael
Marciniak1 and Jason R. Foley2; 1Department
of Engineering Physics, Air Force Institute of Technology,
Wright-Patterson AFB, Ohio; 2Munitions Directorate,
Air Force Research Laboratory, Eglin AFB, Florida.
9:30 AM J3.5
The Electrical Contact Resistance and Adhesion of Intermixed Metal Thin-Films for Use in MEMS Contact Switches. Daniel J. Dickrell, Michael T. Dugger, Paul T. Vianco and Ron S. Goeke; Sandia National Laboratory, Albuquerque, New Mexico.
9:45 AM J3.6
Strain Sensitivity in Conductor-Modified Polymers. Eerik Hantsoo1, Yanan Zhao1, Vanessa B. Chial1, Kevin Chan1, Kenneth Wu1,2 and Beth L. Pruitt1; 1Mechanical Engineering, Stanford University, Stanford, California; 2Materials Science and Engineering, Stanford University, Stanford, California.
10:00 AM BREAK
SESSION J4: Tribology
Chair: Mihri Ozkan
Tuesday Morning, March 29, 2005
Room 2003 (Moscone West)
10:30 AM *J4.1
Surface and Materials Issues for High Reliability MEMS. Roya Maboudian, Chemical Engineering, UC Berkeley, Berkeley, California.
11:00 AM J4.2
Characterization of Ti /TiN and TiN Conductive Layers for
High Temperature MEMS Devices. Peter Lange1,
Birger Ohlsen2, Sebastian Puls1 and Joerg
Syre1; 1MST, FhG-ISIT, Itzehoe, Germany; 2FH-Westkueste,
Heide, Germany.
11:15 AM J4.3
Exchange Spring Type Magnet Realized in FePt/Fe Multilayers Deposited by Magnetron Sputtering. Yousong Gu, Dayong Zhang, Zhen Ji and Yue Zhang; Department of Material Physics and Chemistry, University of Science and Technology in Beijing, Beijing, Beijing, China.
11:30 AM J4.4
Atomic Layer Deposited Tungsten Disulfide Films for LIGA Microsystems: Syntheis and Tribological Behavior. Somuri V. Prasad, Thomas W. Scharf, Michael T. Dugger and Thomas M. Mayer; Sandia National Laboratories, Albuquerque, New Mexico.
11:45 AM J4.5
Sliding Wear In Polysilicon Microelectromechanical Systems. Daan Hein Alsem1,2,3, Eric A. Stach2,3,4, Michael T. Dugger5 and Robert O. Ritchie1,3; 1Material Science and Engineering, University of California Berkeley, Berkeley, California; 2National Center for Electron Microscopy, Lawrence Berkeley National Laboratory, Berkeley, California; 3Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California; 4School of Materials Engineering, Purdue University, West Lafayette, Indiana; 5Materials and Process Science Center, Sandia National Laboratory, Albuquerque, New Mexico.
SESSION J5: Materials and Mechanics
Chair: Ainissa Ramirez
Tuesday Afternoon, March 29, 2005
Room 2003 (Moscone West)
1:30 PM J5.1
Comparison of Suspended versus Clamped Aluminum Nitride Acoustic Resonators. Lori Ann Callaghan1, Vanni Lughi2, Michael V. Requa1, David R. Clarke2,1, Noel C. MacDonald1,2 and Kimberly L. Turner1; 1Mechanical Engineering, University of California, Santa Barbara, Santa Barbara, California; 2Materials, University of California, Santa Barbara, Santa Barbara, California.
1:45 PM J5.2
Fabrication of Electrical Nanocontacts to Nanometer-Sized Materials and Structures
Using a Focused Ion Beam. Francisco Hernandez1, Olga Casals1,
Mohamed Abid2, Sima Valizadeh3, Jordi Rodriguez1,
Anna Vila1, Juan Ramon Morante1 and Albert Romano-Rodriguez1; 1Department
of Electronics, University of Barcelona, Barcelona, Spain; 2Laboratoire
de Physique des Materiaux Nanostructures, Ecole Polytechnique Federale de Lausanne,
Lausanne, Switzerland; 3Angstromlaboratoriet, Univeristy of Uppsala,
Uppsala, Sweden.
2:00 PM J5.3
Surface States of the Wirtzite Type Nanowires. Natalia Malkova and Cun-Zheng Ning; NASA Ames Research Center, Moffett Field, California.
2:15 PM J5.4
Mechanical Integrity of Polymer/Inorganic Interfaces for Micro and Nanosystems. Bree M. Sharratt1 and Reinhold H. Dauskardt2; 1Aeronautics and Astronautics, Stanford University, Stanford, California; 2Materials Science and Engineering, Stanford University, Stanford, California.
2:30 PM J5.5
Through-Wafer Polysilicon Interconnect Fabrication with In-Situ Boron Doping. Ismo Luusua, Kimmo Henttinen, Panu Pekko, Tapani Vehmas and Hannu Luoto; Microelectronics, VTT Information Technology, Espoo, Finland.
2:45 PM J5.6
Degradation of Monolayers Coatings Used in Silicon Microsystems. Michael T. Dugger, Joshua S. Wiehn and James A. Ohlhausen; Sandia National Laboratories, Albuquerque, NM, New Mexico.
3:00 PM BREAK
SESSION J6: Process and Device Modeling
Chair: James Kelly
Tuesday Afternoon, March 29, 2005
Room 2003 (Moscone West)
3:30 PM J6.1
Elastic Self-Healing During Shear Accommodation in Crystalline Nanotube Ropes. Moneesh
Upmanyu and Liang Haiyi; Engineering Division, Materials Science Program,
Colorado School of Mines, Golden, Colorado.
3:45 PM J6.2
Pulse Testing of GaN/AlGaN HEMTs and Device Junction Temperature Measurement. YoungMin Kim, Albert G. Baca, Phil F. Marsh, Andrew A. Allerman, Mark E. Overberg, Joel R. Wendt and Carlos A. Sanchez; Sandia National Laboratories, Albuquerque, New Mexico.
4:00 PM J6.3
Lock-and-Key Effect in the Surface Diffusion of Large Organic Molecules Probed by STM. Roberto Otero Martin1, Fernando Sato2, Peter Thostrup1, Sergio B. Legoas2, Erik Laegsgaard1, Ivan Stensgaard1, Douglas S. Galvao2 and Flemming Besenbacher1; 1Department of Physics and Astronomy, University of Aarhus, Aarhus, Denmark; 2Universidade Estadual de Campinas, Campinas, Brazil.
4:15 PM J6.4
Surface Chemistry and Electrical Properties of Germanium Nanowires. Dunwei Wang and Hongjie Dai; Stanford University, Stanford, California.
4:30 PM J6.5
Measurement of Faradaic Current in AFM Nano-Oxidation of Semiconductor and
its Dependence on Surface Conditions. Naofumi Funakoshi1, Tsutomu Yamada1, Yasushi Takemura1 and Jun-ichi Shirakashi2; 1Electrical & Computer Eng., Yokohama National University, Yokohama, Japan; 2Electrical & Electronic Eng., Tokyo University of Agriculture and Technology, Tokyo, Japan.
4:45 PM J6.6
Electrostatic (Plasmon) Resonances in Metallic and Semiconductor Nanoparticles
and Their Applications. Isaak Mayergoyz and Zhenyu Zhang; Electrical & Computer Engineering, University of Maryland, College Park, Maryland.
SESSION J7: New Materials and Fabrication Methodologies
Chair: David La Van
Tuesday Evening, March 29, 2005
Golden Gate C1/C2/C3 (Marriott)
7:00 PM J7.1
Low Temperature MEMS Manufacturing Processes: Plasma Activated Wafer Bonding. Viorel Dragoi, Shari Farrens and Paul Lindner; Technology, EV Group, Schaerding, Austria.
7:15 PM J7.2
Spontaneous Growth of Nickel Silicide Nanowires and Formation of Self-Assembled Nanobridges by the Metal Induced Growth Method. Joondong Kim1, Wayne A. Anderson1 and Young-Joo Song2; 1Electrical Engineering, University at Buffalo, Buffalo, New York; 2High-Speed SoC, Electronics and Telecommunications Research Institute, Daejeon, Yuseong-gu, South Korea.
7:30 PM J7.3
Size-Dependent Electronic Structures of ZnO Nanowires. Juan Wang, Xi Po An and Quan Li; Physics, The Chinese University of Hong Kong, Hong Kong, Hong Kong.
7:45 PM J7.4
Combination of Soft Lithographic and Nonlithographic Methods of Nanofabrication
for High-Tc Superconductor Systems. Sungwook Kim and John McDevitt; University of Texas at Austin, Austin, Texas.
8:00 PM J7.5
Electrical and Optical Properties of Self-Assembled, Ordered Gold Nanocrystal/Silica Thin Films Prepared by Sol-Gel Processing. Kai Yang1, Hongyou Fan2, Sima La Fontaine1, Daniel M. Boye5, Kevin J. Malloy1, Jeffrey C. Brinker3,4 and Thomas W. Sigmon1; 1Center for High Technology Materials, University of New Mexico, Albuquerque, New Mexico; 2Ceramic Processing and Inorganic Materials Department, Advanced Materials Laboratory, Sandia National Laboratories, Albuquerque, New Mexico; 3Self-Assembled Materials Department, Advanced Materials Laboratory, Sandia National Laboratories, Albuquerque, New Mexico; 4Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico; 5Physics Department, Davidson College, Davidson, North Carolina.
8:15 PM J7.6
Laser Micromachining Using F2-Laser - A Machine Concept for New Materials
in R&D. Jens Haenel, Tino Petsch and Mathias Weber; 3D-Micromac AG,
Chemnitz, Saxony, Germany.
SESSION J8: RF and Optical Applications
Chair: Mark McNie
Tuesday Evening, March 29, 2005
Golden
Gate C1/C2/C3 (Marriott)
8:30 PM J8.1
Micro-Molded High Q Polymer Resonators for Optical Loss Determination. Andrea Martin, Deniz Armani, Bumki Min, Akil Srinivasan and Kerry Vahala; Applied Physics, California Institute of Technology, Pasadena, California.
8:45 PM J8.2
Peculiarities of X-ray Beam Formation for Nanoscale Size Range. Vladimir Konstantinovich Egorov and Evgeniy Egorov; Analytical, Institute of Microelectronics Technology, Chernogolovka, Moscow District, Russian Federation.
9:00 PM J8.3
Fine-Tuning of the Spectral Collection Efficiency in a Multilayer Junction
Through the LSP Technique. Manuela Carvalho Vieira1, Alessandro Fantoni1, Miguel Fernandes1, Paula Louro1, Guilherme Lavareda2 and Carlos Nunes de Carvalho2; 1DEETC, ISEL, Lisbon, Portugal; 2CFM-IST, Lisbon, Portugal.
9:15 PM J8.4
Characterization of Nanoscale Acoustic Vibrations in RF MEMS Resonators by Scanning Force Microscopy Methods. Alvaro San Paulo1, Xuchun Liu1,2 and Jeffrey Bokor1; 1BSAC, UC Berkeley, Berkeley, California; 2School of Electrical and Computer Engineering, Cornell University, Ithaca, New York.
9:30 PM J8.5
Silicon Photodetectors with Self-Assembled Ge Quantum Dots for Near- and Midinfrared Operation. Anatoly Vasilievich Dvurechenskii, Andrew I. Yakimov, Victor V. Kirienko, Alexander I. Nikiforov and Natalia P. Stepina; Institute of Semiconductor Physics, Novosibirsk, Russian Federation.
9:45 PM J8.6
Mechanically Tunable Nanophotonic Devices. Wounjhang Park1,
Ethan Schonbrun1, Mark Tinker2 and Jeong-Bong Lee2; 1Electrical & Computer
Engineering, University of Colorado, Boulder, Colorado; 2Electrical
Engineering, University of Texas, Dallas, Texas.
SESSION J9: Micro- and Nanfluidics
Chair: Cengiz S. Ozkan
Wednesday Morning, March 30, 2005
Room 2003 (Moscone West)
8:15 AM J9.1
CMOS Compatible Integrated Silicon Dioxide Microfluidic Tunnels for Fluidic
Sample Delivery to Nanometer Scale Chemical Sensors. Ali Gokirmak and
Sandip Tiwari; Electrical and Computer Engineering, Cornell University, Ithaca,
New York.
8:30 AM J9.2
Microfluidic Platform for the Generation of Polymer Particles. Zuzanna Cygan, Kathryn L. Beers and Eric J. Amis; Polymers Division, National Institute of Standards and Technology, Gaithersburg, Maryland.
8:45 AM *J9.3
New Frontiers for Electric Field Assisted Heterogeneous Integration and Nanofabrication. Michael Heller; Department of Bioengineering, University of California, San Diego, California.
9:15 AM J9.4
Novel Microfluidic Reactors for the Synthesis of Unconventional Materials. Kyung M. Choi1,3, Abraham P. Lee2 and Kenneth J. Shea1; 1Department of Chemistry, University of California-Irvine, Irvine, California; 2Biomedical Engineering, Mechanical and Aerospace Engineering, University of California-Irvine, Irvine, California; 3Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois.
9:30 AM J9.5
High Resolution Parallel Microfluidic Arrays. Yu Xiang and David A. LaVan; Mechanical Engineering, Yale University, New Haven, Connecticut.
9:45 AM J9.6
Glancing Angle Deposition Thin Film Microstructures for Microfluidic Applications. Gregory K. Kiema, Martin O. Jensen and Michael J. Brett; Electrical and Computer Engineering, University of Alberta, Edmonton, Alberta, Canada.
10:00 AM BREAK
SESSION J10: Drug and Protein Delivery
Chair: David La Van
Wednesday Morning, March 30, 2005
Room 2003 (Moscone West)
10:30 AM J10.1
Novel Fluorescent Noble Metal Quantum Dots. Robert M. Dickson and Jie
Zheng; Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta,
Georgia.
10:45 AM J10.2
Micro and Nano-Assembly of Devices. Mihri Ozkan, University of California, Riverside, Riverside, California.
11:00 AM J10.3
High Density Chemical Delivery Arrays with Temporal and Spatial Control. Morgan Mager, Adam Freund and Nicholas A. Melosh; Materials Science, Stanford University, Stanford, California.
11:15 AM J10.4
Electrokinetic Transport of Rigid and Soft Molecules in 2D and 3D Nanofluidic
Geometries. Shengnian Wang, Xin Hu and Ly James Lee; Chemical and
Biomolecular Engineering, Ohio State University, Columbus, Ohio.
11:30 AM J10.5
Luminescence Enhancement and Inhibition Properties of Core-Shell Silica Fluorescent Nanoparticles. Carl Poitras1, Michal Lipson1, Andrew Burns2 and Ulrich Wiesner2; 1Electrical and Computer Engineering, Cornell University, Ithaca, New York; 2Materials Science and Engineering, Cornell University, Ithaca, New York.
11:45 AM J10.6
Efficient Atomization Using MHz MEMS-Based Integrated Ultrasonic Nozzles. Shirley C. Tsai1, Yue L. Song2,3, Yuan F. Chou4, J. H. Cheng4 and Chen S. Tsai3,5; 1Chemical Engineering, California State University, Long Beach, Long Beach, California; 2Physics, National Taiwan University, Taipei, Taiwan; 3Electrical Engineering and Computer Science, University of California, Irvine, California; 4Mechanical Engineering, National Taiwan University, Taipei, Taiwan; 5Electrooptical Engineering, National Taiwan University, Taipei, Taiwan.
SESSION J11: Actuators for BioMEMS
Chair: Somuri Prasad
Wednesday Afternoon, March 30, 2005
Room 2003 (Moscone West)
1:30 PM J11.1
ABSTRACT WITHDRAWN
1:45 PM J11.2
Thin Film Silicon Microbridges for DNA Detection. Teresa Adrega1, J. Gaspar1, F. Fixe1,2, V. Chu1, D. M. F. Prazeres2 and J. P. Conde1,3; 1INESC-MN, Lisbon, Portugal; 2Center of Biological and Chemical Engineering, Instituto Superior Tecnico, Lisbon, Portugal; 3Department of Chemical Engineering, Instituto Superior Tecnico, Lisbon, Portugal.
2:00 PM J11.3
Fabrication and Electromechanical Properties of Conductive Polymer Microbridge Actuators. Guandong Zhang1, J. Gaspar1, V. Chu1 and J. P. Conde1,2; 1INESC-MN, Lisboa, Portugal; 2Chemical Engineering, Instituto Superior Tecnico, Lisboa, Portugal.
2:15 PM J11.4
Low-cost and Chemical Resistant Microfluidic Devices Based on Thermoplastic
Elastomers for a Novel Multiple Parameter Biosensor System. Ivan Stoyanov, Stefan Glass, Michael Tewes, Eckhard Quandt and Markus Loehndorf; Nano- and Microstructures, Research Center Caesar, Bonn, Germany.
2:30 PM J11.5
Multi-Layer Photopolymer Micromachining. Jiunn-Ru Jeffrey Huang1, Bo Bai2, Jeffrey Shaw1, Thomas N. Jackson2, Ching-Yeu Wei1, Venkatesan Manivannan3 and Kevin M. Durocher1; 1Micro- and Nano-Structures Technologies, GE Global Research Center, Niskayuna, New York; 2Center for Thin Film Devices, Electronic Materials and Processing Research Laboratories, Department of Electrical Engineering, Pennsylvania State University, University Park, Pennsylvania; 3Ceramic and Metallelurgy Technologies, GE Global Research Center, Niskayuna, New York.
2:45 PM J11.6
A Novel Latching Relay Fabricated Using a Oxide Molded Tungsten Process. Jim Fleming, Michael Baker and David Luck; Sandia Nat Labs, Albuquerque, New Mexico.
3:00 PM BREAK
SESSION J12: Process and Device Modeling
Chair: Mark McNie
Wednesday Afternoon, March 30, 2005
Room 2003 (Moscone West)
3:30 PM J12.1
Helical Oligothiophenes as Spring-Like Electromechanical Actuators. Adah Almutairi and Michael J. Marsella; Chemistry, University of California Riverside, Riverside, California.
3:45 PM J12.2
Hot Embossing Lithography: Release Layer Characterization
by Chemical Force Microscopy. Neil S. Cameron1, Arnaud Ott2,1, Helene Roberge1, and Teodor Veres1; 1IMI, National Research Council-Canada, Boucherville, Quebec, Candad; 2Ecole Superieure D'Ingenieurs de Recherche en Materiaux, Dijon, France.
4:00 PM J12.3
Stochastic Frequency Signature for Chemical Sensing via Noninvasive Neuronelectronic
Interface. Cengiz Sinan Ozkan and Mo Yang; Mechanical Engineering,
University of California at Riverside, Riverside, California.
4:15 PM J12.4
Carbohydrate-Carbohydrate Recognition Promotes Membrane Adhesion. Christine Gourier1, Eric Perez1, Yongmin Zhang2 and Pierre Sinay2; 1Laboratoire de Physique Statistique, Ecole Normale Superieure, Paris, France; 2Departement de Chimie, Ecole Normale Superieure, Paris, France.
4:30 PM J12.5
Fabrication of Microfluidic Channels with Integrated Transducers for Fluid
Pumping. Mary Elizabeth Anito1,2 and Goksen G. Yaralioglu2; 1Materials Sci. and Engineering, Johns Hopkins University, Baltimore, Maryland; 2Electrical Engineering, Stanford University, Palo Alto, California.
4:45 PM J12.6
The Nano Pulverization of Liuwei Dihuang. Peiyan Ma1, Zhengyi
Fu2 and Yanli Su3; 1State Key Lab of Advanced
Technology for Materials Synthesis and Processing, Wuhan University of Technology,
Wuhan, China; 2State Key Lab of Advanced Technology for Materials
Synthesis and Processing, Wuhan University of Technology, Wuhan, China; 3State
Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan
University of Technology, Wuhan, China.
SESSION J13: Poster Session
Chairs: David La Van and Cengiz S. Ozkan
Wednesday Evening, March 30, 2005
8:00 PM
Salons 8-15 (Marriott)
J13.1
Fabrication of Nanopillars by Nanosphere Lithography.
Chin Li Cheung1, Rebecca J. Welty2,
Catherine Reinhardt2 and Tzu-Fang Wang1;
1Chemistry and Materials Science, Lawrence Livermore
National Laboratory, Livermore, California; 2Center
for Micro and Nano Technology, Lawrence Livermore National
Laboratory, Livermore, California.
J13.2
Synthesis of BaCrO4 Nano-Crystallites within Thermally
Evaporated Sodium bis-2-ethylhexyl-sulfosuccinate and
Stearic
Acid Thin Films. Kaustav Sinha1, Debabrata
Rautaray2 and Murali Sastry2; 1Department
of Materials & Metallurgical Engineering, University of
Nevada, Reno, Reno, Nevada; 2Department of
Materials Chemistry, National Chemical Laboratory, Pune,
Maharashtra, India.
J13.3
Characterization of Benzocyclobutene and Chromium-Gold
Film Interface for Application in Silicon Micromachining.
Nima Ghalichechian1, Alireza Modafe1,
Paolo Lazzeri3, Victor Micheli3, Mariano
Anderle3 and Reza Ghodssi1,2; 1Electrical
and Computer Engineering, University of Maryland, College
Park, Maryland; 2The Institute for Systmes Reserach,
University of Maryland, College Park, Maryland; 3ITC-irst
Centro per la Ricerca Scientifica e Tecnologica, Trento, Italy.
J13.4
Fabrication and Evaluation of Conducting Polymer Nanowire
Heterostructures. Yevgeny Berdichevsky and Y.-H.
Lo; Electrical and Computer Engineering Department, University
of California, San Diego, La Jolla, California.
J13.5
Composition Influence on the Properties of Titanium-Doped
Gamma Iron Oxides Nanoparticles Prepared by Laser Pyrolysis.
Ion Morjan1, Rodica Alexandrescu1,
Florian Dumitrache1, Ion Sandu1, Monica
Scarisoreanu1, Lavinia Albu1, Iuliana
Soare1, Ion Voicu1, Bohumil David2
and Victor Ciupina3; 1Laboratory of
Laser Photochemistry, National Institute for Laser, Plasma
and Radiation Physics, Bucharest, Romania; 2Institute
of Material Physics, Brno, Czech Republic; 3Ovidius
University, Constanta, Romania.
J13.6
A Systematic Study of the Formation of Nano-Tips on Silicon
Thin Films by Excimer Laser Irradiation. D. G. Georgiev1,
R. J. Baird1, I. Avrutsky1, G. Auner1,
G. Newaz2 and N. Tokranova3; 1Dept.
of Electrical and Computer Engineering, Wayne State University,
Detroit, Michigan; 2Dept. of Mechanical Engineering,
Wayne State University, Detroit, Michigan; 3Institute
for Materials, SUNY at Albany, Albany, New York.
J13.7
Functionally Engineered Carbon Nanotubes Peptide Nucleic
Acid Nanocomponents. Krishna Veer Singh1,
Cengiz S. Ozkan3, Roger Lake2, Alexander
Balandin2 and Mihrimah Ozkan2,1; 1Chemical
& Environmental Engineering, University of California, Riverside,
Riverside, California; 2Electrical Engineering,
University of California, Riverside, Riverside, California;
3Mechanical Engineering, University of California,
Riverside, Riverside, California.
J13.8
Investigation of Electric Characteristics of Nanoscale
Composite A1B5C6 Semiconductors: Experiment and Numerical
Simulation. Halyna M. Khlyap1, Ludmila
Panchenko3, Violetta Bilozertseva4 and
Petro Shkumbatiuk2; 1Physics, University
of Technology, Kaiserslautern, Germany; 2Physics,
State Pedagogical University, Drohobych, Ukraine; 3Physics,
Sumy State University, Sumy, Ukraine; 4National
Technical University, Kharkiv, Ukraine.
J13.9
Etching Silicon Through an Effective Nanomask: An Electrochemical
Way to Nanomachining. Stefano Borini, Andrea M.
Rossi, Luca Boarino and Giampiero Amato; Nanotechnology and
Microsystems, IEN Galileo Ferraris, Torino, Italy.
J13.10
Characterisation of Thin Film Piezoelectric Materials
by Differential Interferometric Techniques. Markys
Cain
and Mark Stewart; National Physical Laboratory, Teddington,
United Kingdom.
J13.11
An Optical Diffraction Microphone with Active Grating Diaphragm.
Kazuhiro Suzuki, Hideyuki Funaki and Yujiro Naruse;
Corporate Research & Development Center, Toshiba Corporation,
Kawasaki, Kanagawa, Japan.
J13.12
A Theoretical Model for the CO Adsorption Kinetics on
Cu(110) by Reflectance Anisotropy. Letizia Chiodo1
and Patrizia Monachesi2; 1Dipartimento
di Fisica, Universita' di Roma "Tor Vergata" and INFM, Roma,
Italy; 2Dipartimento di Fisica, Universita' dell'Aquila
and INFM, L'Aquila, Italy.
J13.13
Fabrication of a Bimodal Ferromagnetic Nanosystem in an
Etched Silicon Structure and its Magnetically and Magneto-Optically
Behaviour. Petra Granitzer1, Klemens
Rumpf1, Peter Poelt2, Angelika Reichmann2,
Svetlozar Surnev1 and Heinz Krenn1;
1Institute of Experimental Physics, University
of Graz, Graz, Austria; 2Research Institute for
Electron Microscopy, Technical University of Graz, Graz,
Austria.
J13.14
Nanocomposite Thin Film Coatings for Ageing Aircraft Skins.
Ramazan Asmatulu, Richard O. Claus, Jeffrey B. Mecham
and Sean G. Corcoran; FEORC, Virginia Tech, Blacksburg, Virginia.
J13.15
Thermal Stability of Ir/TaN Electrode/Barrier on Thin Gate
Oxide for MFMOS Structure Application. Haogang Zang,
Mechnical Engineering, North China Electric Power University,
Baoding, Hebei, China.
J13.16
Conductive Nanocomposites Incorporating Polymer-Modified
Carbon Black. Valtencir Zucolotto1,
Jamshid Avlyanov2, Rinaldo Gregorio Jr.3
and Luiz H. C. Mattoso4; 1DFCM, University
of Sao Paulo, Sao Carlos, SP, Brazil; 2Eeonyx Co.,
Pinole, California; 3DEMa, Federal University of
Sao Carlos, Sao Carlos, SP, Brazil; 4EMBRAPA, Sao
Carlos, SP, Brazil.
J13.17
Spectroscopic Investigation of Ferromagnetic Co-Doped
TiO2.
Jong-Pil Kim1, Chae Ryong Cho1,
Mi-Sook Won1, Jang-Hee Yoon1, Kyung-Soo
Hong1, Se-Young Jeong2 and Dong-Ho
Kim3;
1Busan Branch, Korea Basic Science Institute,
Busan, South Korea; 2School of nanoscience and
technology, Pusan National University, Busan, South Korea; 3Department
of Physics, Yeungnam University, Gyeongsan, South Korea.
J13.18
Embedded Piezoresistive Microcantilever Sensors: Materials
for Sensing Chemical and Biological Analytes. Timothy
L. Porter, William Delinger, Randy Dillingham and Robert
Gunter; Physics, Northern Arizona University, Flagstaff, Arizona.
J13.19
Fabrication of Nano-Gap Electrodes with Controlled Gap-Widths
Using Atomic-Layer-Deposited Sacrificial Layers. Chan
Woo Park, Jung-Wook Lim, Han Young Yu, Ung Hwan Pi
and Sung-Yool Choi; Electronics and Telecommunications
Research
Institute, Daejeon, South Korea.
J13.20
Comparison of Laterally Aligned InGaAs/GaAs Quantum Dots
Grown by MBE and ALE Techniques. Sam K. Noh1,
S. J. Lee1, J. C. Park1, J. O. Kim1,
K. -S. Lee2 and J. W. Choe3; 1Materials
Evaluation Center, Korea Research Institute of Standards and
Science, Daejeon, South Korea; 2Basic Research
Center, Electronics and Telecommunications Reserarch Insititute,
Daejeon, South Korea; 3Dept. of Physics, Kyunghee
Univ., Suwon, South Korea.
J13.21
Interpretation of the Phonon Frequency Shifts in ZnO Quantum
Dots. Khan A. Alim, Vladimir A. Fonoberov and
Alexander A. Balandin; Nano-Device Laboratory,
Department of Electrical Engineering, University of California
- Riverside, Riverside, California.
J13.22
SnO2 Doping Effect in In2O3(ZnO)k Ceramics : Change in
Electrical Characteristics and Solubility Limit. Kyung-Han
Seo, Joon-Hyung Lee and Jeong-Joo Kim; Inorganic Materials
Engineering, Kyungpook national university, Daegu, South
Korea.
J13.23
Effects of e-Beam Annealing on Structural and Optical
Properties of GaN Nanorods. Deuk Young Kim1,2, Chang
Seok Han1,2, Sejoon Lee1,2, Sun
Jae Hwang1,2, Duck Nam Kim1,2, Hye
Sung Lee1,2, Doo Soo Kim1, Hosang
Lee2,
Sungryong Ryu2, Jinhyoung Cho2, Hwa-Mok
Kim2 and Tae Won Kang2; 1Semiconductor
Science, Dongguk University, Seoul, South Korea; 2Quantum-functional
Semiconductor Research Center, Dongguk University, Seoul,
South Korea.
J13.24
Second Harmonic Generation Imaging of Micro-Array of Surface-Immobilized
Gold Nanoparticle on Gold Surface. Kazuma Tsuboi1
and Kotaro Kajikawa1,2; 1Japan Science
and Technology Agency, Kawaguchi, Saitama, Japan; 2Interdisciplinary
Graduate School of Science and Engineering, Tokyo Institute
of Technology, Yokohama, Kanagawa, Japan.
J13.25
Study
of Contact Between Carbon Nanotubes and Bulk GaAs Semiconductor.
Chen-Wei Liang and Siegmar Roth; Solid State Research,
Max-Planck-Institute, Stuttgart, Germany.
SESSION J14: Materials and Devices
Chair: Rashid Bashir
Thursday Morning, March 31, 2005
Room 2003 (Moscone West)
8:45 AM J14.1
A Novel Photo-Patterning Method for PHEMA Hydrogels.
Stephanie J. Bryant1, Kip D. Hauch1
and Buddy D. Ratner1,2; 1Bioengineering,
University of Washington, Seattle, Washington; 2Chemical
Engineering, University of Washington, Seattle, Wyoming.
9:00 AM J14.2
Fabrication of Microstructured Silicon (μs-Si) from
a Bulk Si Wafer for Printable Thin Film Transistors. Keon
Jae Lee1, Heejoon Ahn2, Dahl Young
Khang1, Etienne Menard1, John A. Rogers1
and Ralph G. Nuzzo2,1; 1Materials Science
and Engineering, University of Illinois Urbana Champaign,
Urbana, Illinois; 2Chemistry, University of Illinois
Urbana Champaign, Urbana, Illinois.
9:15 AM J14.3
In Vivo Behavior of Silicon Oxide and Silicon Nitride Films.
John M. Maloney, Sara A. Lipka and Samuel P. Baldwin;
MicroCHIPS, Inc., Bedford, Massachusetts.
9:30 AM J14.4
In-Situ Pretreament Approach for Surface Deterioration
Alleviation Amidst Thermal Desorption of GaAs (100). Arthur
Pun1, Xu Wang1, Jamie Meeks1,
Steve Durbin2 and Jim Zheng1; 1Electrical
and Computer Engineering, FAMU-FSU College of Engineering,
Tallahassee, Florida; 2MacDiarmid Institute for
Advanced Materials and Nanotechnology, University of Canterbury,
Christchurch, New Zealand.
9:45 AM J14.5
Effect of Donor and Acceptor Dopants on the Band Structure
of Barium Strontium Titanate Thin Films. Yuebing Zheng,
Shijie Wang and Cheng Hon Alfred Huan; Institute of Materials
Research and Engineering, Singapore, Singapore.
J14.6 TRANSFERRED TO J13.25
10:00 AM BREAK
SESSION J15: MEMS and Photonics
Chair: Mihri Ozkan
Thursday Morning, March 31, 2005
Room 2003 (Moscone West)
10:30 AM J15.1
Fabrication of GaN Photonic Crystal Membrane Cavities. Cedrik Meier1,
Elaine D. Haberer1, Rajat Sharma2, Kevin Hennessy1,
Kelly McGroddy2, Shuji Nakamura2, Steven P. DenBaars2 and
Evelyn L. Hu1; 1California NanoSystems Institute, University
of California, Santa Barbara, Santa Barbara, California; 2Materials
Deparrtment, University of California, Santa Barbara, Santa Barbara, California.
10:45 AM J15.2
Photon by Photon Analysis of Single Quantum Dot Emission Dynamics. Hauyee Chang, Kai Zhang, Lucas P. Watkins and Haw Yang; Chemistry, University of California, Berkeley, California.
11:00 AM J15.3
Multi-band Terahertz Imaging System Design. Liviu Popa-Simil, AFCI-D5, Los Alamos National Laboratory, Los Alamos, New Mexico.
11:15 AM J15.4
ABSTRACT WITHDRAWN
11:30 AM J15.5
A Wide Band Gap Boron-Doped Microcrystalline Silicon Film Obtained with VHF
Glow Discharge Method. Zhuf Feng, Nankai University, Institute of Photo-electronics, Tianjin, Tianjin, China.
11:45 AM J15.6
Diode Laser Bonding of Planar MEMS, MOEMS, & Microfluidic Devices. James T. Clements1, Jerry Zybko2 and Jie-Wie Chen3; 1NanoSciences, Inc., Aliso Viejo, California; 2Leister Technologies, LLC, Itasca, Illinois; 3Leister Process Technologies, Sarnen, Switzerland.
SESSION J16: Sensors and Materials
Chair: Rashid Bashir
Thursday Afternoon, March 31, 2005
Room 2003 (Moscone West)
1:30 PM J16.1
Investigating Narrow Plasmons in Nanoparticle Arrays Fabricated Using Electron Beam Lithography. Erin McLellan Hicks1, Richard P. Van Duyne1, Linda Gunnarsson3, Bengt Kasemo3, Tomas Rindzevicius2 and Mikael Kall2; 1Chemistry, Northwestern University, Evanston, Illinois; 2Applied Physics, Chalmers University of Technology, Gothenburg, Sweden; 3Chemical Physics, Chalmers University of Technology, Gothenburg, Sweden.
1:45 PM J16.2
Electrostatic Control of Ions and Molecules in Nanofluidic Transistors. Rohit Karnik1, Min Yue2, Rong Fan3, Kenneth Castelino1, Christine Trinkle1, Deyu Li4, Peidong Yang3,5 and Arun Majumdar1,5; 1Mechanical Engineering, University of California, Berkeley, California; 2Applied Biosystems, Foster City, California; 3Chemistry, University of California, Berkeley, California; 4Mechanical Engineering, Vanderbilt University, Nashville, Tennessee; 5Materials Sciences Division, Lawrence Berkeley National Laboaratory, Berkeley, California.
2:00 PM J16.3
Microchannel Arrays in Borophosphosilicate Glass for Photonic Device and Optical Sensor Applications. Claire L. Callender, Patrick Dumais, Chantal Blanchetiere, Christopher J. Ledderhof and Julian P. Noad; Communications Research Centre, Ottawa, Ontario, Canada.
2:15 PM J16.4
Polypyrrole-Based Humidity Sensor Fabricated by Layer-by-Layer Nano-Assembly. Razat Nohria, Yi Su, Rajneek Khillan, Rohit Dikshit, Yuri Lvov and Kody Varahramyan; Institute for Micromanufacturing, Louisiana Tech University, Ruston, Louisiana.
2:30 PM J16.5
Stabilized Pd-Alloy/AlN/Si Hydrogen Sensor. Linfeng Zhang1, Ibrahim Al-Homoudi2, Md H. Rahman3, Eirk F. McCullen1, Lajos Rimai1, Ron J. Baird1, Ratna Naik4, Golam Newaz2, Gregory W. Auner1 and K. Y. Simon Ng3; 1Electrical and Computer Engineering, Wayne State University, Detroit, Michigan; 2Mechanical Engineering, Wayne State University, Detroit, Michigan; 3Chemical Engineering and Materials Science, Wayne State University, Detroit, Michigan; 4Physics and Astronomy, Wayne State University, Detroit, Michigan.
2:45 PM J16.6
Templated Growth and Overgrowth of Organic Nanofibers. Edward Kintzel1, Frank Balzer2 and Horst-Guenter Rubahn3; 1Spallation Neutron Source, Oak Ridge National Laboratory, Oak Ridge, Tennessee; 2Institut für Physik/ASP, Humboldt-Universität zu Berlin, Berlin, Germany; 3Fysisk Institut, Syddansk Universitet, Odense, Denmark.
3:00 PM BREAK
SESSION J17: Nanosystems and Devices
Chair: Kevin Turner
Thursday Afternoon, March 31, 2005
Room 2003 (Moscone West)
3:30 PM J17.1
Microfluidic Integration of Ultramicroelectrode Cells for Direct Electronic Detection of Biomolecular Signals in the Picoampere Range. Napat Triroj and Roderic Beresford; Engineering, Brown University, Providence, Rhode Island.
3:45 PM J17.2
Biocompatible Polymer Matrix for Oriented Protein Insertion and Optimal Functionality. Hyeseung Lee, UCLA, Los Angeles, California.
4:00 PM J17.3
Field and Fluorescence Modification by Colloidal Gold Nanoparticles. Kai Zhang and Haw Yang; Chemistry, University of California, Berkeley, Berkeley, California.
4:15 PM J17.4
Gate Effects for a Molecule-Nanoparticle Network Device. Shinichiro
Kondo, Ryoichi Yasuda, Daisuke Hobara, Yuuki Ishioka, Shintaro Hirata, Masaru
Wada and Jiro Kasahara; Fusion Domain Laboratory, Materials Laboratories, Sony
Corporation, Ota-ku, Tokyo, Japan.
4:30 PM J17.5
Multi-Technology Measurements of Amorphous Carbon Films. Stephen J.
Morris, Eileen Clifford, Osman Sorkhabi, Xiaoping Liu, Jingmin Leng and Heath
Pois; Therma-Wave Inc., Fremont, California.
SESSION J18: Poster Session
Chairs: Mark McNie and Somuri Prasad
Thursday Evening, March 31, 2005
8:00 PM
Room 2003 (Moscone West)
J18.1
Hybrid Virus Networks with Quantum Dots and Carbon Nanotubes. Nathaniel
Gerald Portney1, Krishna Singh1, Sumit Chaudhary2,
Giuseppe Destito3, Anette Schneemann3, Marianne Manchester3,4 and
Mihrimah Ozkan2,1; 1Chemical and Environmental Engineering,
University of California, Riverside, Riverside, California; 2Electrical
Engineering, University of California, Riverside, Riverside, California; 3Molecular
Biology, The Scripps Research Institute, La Jolla, California; 4Center
for Integrative Molecular Biosciences, The Scripps Research Institute, La Jolla,
California.
J18.2
ABSTRACT WITHDRAWN
J18.3
Process Development of a Reconfigurable MEMs-Based Photonic Crystal Waveguide
Device. Gerard Dang, Weimin Zhou and Monica Taysing-Lara; US Army
Research Lab, Adelphi, Maryland.
J18.4
Synthesis and Characterization of Chitosan-Fe3O4 Magnetic
Nanocomposites. Patricia Lara, Marleth Mena, Moises Hinojosa and Virgilio Gonzalez; Div. de Ingenieria Mecanica, FIME-UANL, San Nicolas de los Garza, Nuevo Leon, Mexico.
J18.5
Negative Transverse Magnetoresistance Effect in Bismuth Nanowires. Dmitry Vasilievich Gitsu1, Tito E. Huber2, Leonid Alexandrovich Konopko1,3 and Albina Alexandrovna Nikolaeva1,3; 1Institute of Applied Physics, Chisinau, Moldova; 2Department of Chemistry, Howard University, Washington, Washington; 3International Laboratory of High Magnetic Fields and Low Temperatures, Wroclaw, Poland.
J18.6
Towards Novel Light-Activated Shape Memory Polymer: Thermomechanical Properties
of Photo-Responsive Polymers. Emily Snyder and Tat Hung Tong; Cornerstone Research Group, INC., Dayton, Ohio.
J18.7
Metallic Nanoparticles Embedded in Plasma Polymerized Matrix : TEM and XPS
Measurements. Alexandre Felten, Carla Bittencourt and Jean-Jacques
Pireaux; LISE, University of Namur, Namur, Belgium.
J18.8
Surface Modification and Neural Tissue Culture of Thin Film Electrode Materials. Sachin Suresh Thanawala1, Saida P. Khan3, Olena Palyvoda2, Daniel G. Georgiev2, Ibrahim A. Al-Homoudi4, G. Newaz4 and Gregory Auner2,1; 1Biomedical Engineering, Wayne State University, Detroit, Michigan; 2ECE, Wayne State University, Detroit, Michigan; 3Chemical Engineering, Wayne State University, Detroit, Michigan; 4Mechanical Engineering, Wayne State University, Detroit, Michigan.
J18.9
Atomic Force Microscopy Probe with Integrated Loop and Shielded Leads for Micromagnetic Sensing. Douglas Lagally1, Abdolreza Karbassi2, Charles Paulson2 and Daniel van der Weide2; 1Materials Science Program, University of Wisconsin-Madison, Madison, Wisconsin; 2Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin.
J18.10
Functionalisation of Microfluidic Channels with In Situ Grown Carbon Nanotubes. Kjetil Gjerde1, Tommy Schurmann1, Ken B. K. Teo2, William I. Milne2 and Peter Boggild1; 1Dept. of Micro and Nanotechnology, Technical University of Denmark, Kgs Lyngby, Denmark; 2Dept. of Engineering, University of Cambridge, Cambridge, United Kingdom.
J18.11
Characterization and Processing of Vanadium Dioxide Thin Films for Advanced
Optical and Electrical Switching Devices. Mohamed Soltani1, Luc
Stafford2, Mohamed Chaker1 and Joelle Margot2; 1INRS-Energie,
Materiaux et Telecommunications, Varennes, Quebec, Canada; 2Departement
de Physique, Universite de Montreal, Montreal, Quebec, Canada.
J18.12
Effect of Substrate Materials on the Electrical Behavior of Pd/AlN/Semiconductor
Based Hydrogen Sensors. Md Habibur Rahman1, L. Zhang2,
Ibrahim A. Al-Homoudi3, E. F. McCullen4, L. Rimai2,
R. Naik4, K. Y.S. Ng1, R. J. Baird2, G. W. Auner2 and
G. Newaz3; 1Chemical Engineering and Materials Science,
Wayne State University, Detroit, Michigan; 2Department of Electrical
and Computer Engineering, Wayne State University, Detroit, Michigan; 3Department
of Mechanical Engineering, Wayne State University, Detroit, Michigan; 4Department
of Physics and Astronomy, Wayne State University, Detroit, Michigan.
J18.13
Sonochemical and Microwave Synthesis Of ZnO Nanoparticles. Isi Umolu Abhulimen1, Xiang-Bai Chen2, John L. Morrison2, Vijaya Kumar Rangari3, Leah Bergman2 and Kalyan Kumar Das1; 1Department of Electrical Engineering, Tuskegee University, Tuskegee, Alabama; 2Department of Physics, University of Idaho, Moscow, Idaho; 3Center of Advanced Materials, Tuskegee University, Moscow, Alabama.
J18.14
Focused Ion Beam Characterization of Materials with Varying Crystallinity. Jennifer Y. Lee1, Jessica E. Bickel1, Joanna Mirecki Millunchick1, John F. Mansfield2, Bongsup Shim3, Nicholas A. Kotov3, Tesfu Solomon3, Michael J. Solomon3 and Joerg Lahann3,1; 1Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan; 2Electon Microbeam Analysis Laboratory, University of Michigan, Ann Arbor, Michigan; 3Chemical Engineering, University of Michigan, Ann Arbor, Michigan.
J18.15
Low Dose Ionizing Radiation Detection Using Luminescent Polymers. Rodrigo Fernando Bianchi1,2, J. Borin3, E. A. B. Silva3, P. Nicolutti3, T. Guilhardi Neto3 and C. F. O. Graeff3; 1Departmento de Fisica e Ciencia dos Materiais, Universidade de Sao Paulo, Sao Carlos, Sao Paulo, Brazil; 2Departamento de Sistemas Eletronicos, Escola Politecnica da Universidade de Sao Paulo, Sao Paulo, Sao Paulo, Brazil; 3Departamento de Fisica e Matermatica, Universidade de Sao Paulo, Ribeirao Preto, Sao Paulo, Brazil.
J18.16
Synthesis, Cathodoluminescence and Photoluminescence of ZnO Nanowires. Aurangzeb Khan1,2 and Martin E. Kordesch1,2; 1Physics and Astronomy, Ohio University, Athens, Ohio; 2CMSS, Ohio University, Athens, Ohio.
J18.17
Design and Fabrication of Novel Nanotube Electrophysiological Probes. Ludovico
M. Dell'Acqua-Bellavitis, Jake D. Ballard, Rena Bizios and Richard W. Siegel;
Nanotechnology Center, Rensselaer Polytechnic Institute, Troy, New York.
J18.18
Anomalous Temperature Dependence of Fermi-Edge Singularity in Photoluminescence Spectra of Modulation-Doped AlGaAs/InGaAs/GaAs Heterostructures. K. Gopalakrishna Naik1, K. S. R. Koteswara Rao1, T. Srinivasan2, R. Muralidharan2 and S. K. Mehta2; 1Indian Institute of Science, Bangalore, India; 2Solid State Physics Laboratory, Delhi, Delhi, India.
J18.19
Separate Control of InAs Quantum Dot Density and Uniformity on GaAs (001). Zuoming
Zhao and Ya-Hong Xie; Materials Science and Engineering, UCLA, Los Angeles,
California.
J18.20
A Combined Vapor and Electrochemical Deposition Approach to the Controlled Growth of Nanoscale Metal Dendritic Islands, Beaded Wires, and Continuous Wires. Cobey Cross, John C. Hemminger and Reginald M. Penner; Chemistry, University of California Irvine, Irvine, California.
J18.21
Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites. Zuruzi Abu Samah1, Marcus S. Ward1, Ding Chang Song2 and Noel C. MacDonald1,2; 1Materials Department, University of California, Santa Barbara, California; 2Mechanical and Environmental Engineering, University of California, Santa Barbara, California.
J18.22
Nanoindentation Mechanical Property Measurements of ZnS Nanobelts. Xiaodong Li1, Xinnan Wang1, Qihua Xiong2 and Peter C. Eklund2; 1Department of Mechanical Engineering, University of South Carolina, Columbia, South Carolina; 2Department of Physics, The Pennsylvania State University, University Park, Pennsylvania.
J18.23
Hydrogen-Mediated Ferromagnetism in ZnCoO. Se-Young Jeong1,3,
Chae-Ryong Cho2, Chul Hong Park4 and Hyun-Jun Lee3; 1School
of Nanoscience and technology, Pusan National University, Busan 609-735, South
Korea; 2Korea Basic Science Institute, Busan 609-735, South Korea; 3Advanced
Materials Research Laboratory, COMTECS Limited, Daegu 704-702, South Korea; 4Research
center for dielectric and advanced matter physics, Pusan National University,
Busan 609-735, South Korea.
J18.24
Thermally Stimulated Electron Emission Phenomena from Scratched Metal Surfaces. Keiji Nakayama and Hitoshi Matamura; AIST, Tsukuba, Japan.
J18.25
Correlating Thermoelectric Efficiency with Nanowire Diameter for Electrodeposited
Bismuth Telluride Nanowire Arrays. Erik Menke and Reg Penner; Chemistry, University of California, Irvine, Irvine, California.
J18.26
Fabrication Methods for Improved Electromechanical Behavior in Micromachined Piezoelectric Membranes. Michelle C. Robinson, Phillip D. Hayenga, Jeong H. Cho, Cecilia D. Richards, Robert F. Richards and David F. Bahr; Materials and Mechanical Engineering, Washington State University, Pullman, Washington.
J18.27
Electron Tunneling at Nano-Cross-Bar Junctions. Nicholas Prokopuk1 and Kyung-ah Son2; 1Chemistry and Materials Division, Naval Air Warfare Center, China Lake, California; 2Jet Propulsion Laboratory, Pasadena, California.
J18.28
Quantum Sizing of Power Electronics: A Trend Towards Miniaturization of Power Electronic Systems and Equipments. Arindam Chakraborty and Ali Emadi; ECE, Illinois Institute of Technology, Chicago, Illinois.
J18.29
In Search of Metallic Nanowires on Si(001). Inder P. Batra and Bikash C. Gupta; Department of Physics, University of Illinois at Chicago, Chicago, Illinois.
J18.30
Space Charge Limited Current in Porous Silicon with Traces of Nitrogen Dioxide. Stefano Borini, Andrea M. Rossi, Luca Boarino and Giampiero Amato; Nanotechnology and Microsystems, IEN Galileo Ferraris, Torino, Italy.
J18.31
Novel Approach to Fabrication of Atomic-Scale Free-Standing Circular INP Membranes for MEMS Applications. Oleksa Hulko1, Brad J. Robinson1 and Rafael N. Kleiman1,2; 1Centre for Electrophotonic Materials and Devices (CEMD), McMaster University, Hamilton, Ontario, Canada; 2Department of Engineering Physics, McMaster University, Hamilton, Ontario, Canada.
J18.32
Functional Carbon Nanotube Substrates for Tissue Engineering Applications. Cengiz Sinan Ozkan and Xuan Zhang; Mechanical Engineering, University of California at Riverside, Riverside, California.
J18.33
Low Voltage Electrowetting on Dielectric (EWOD) for Microfluidic Optics Applications. Raj K. Dash, Amir H. Hirsa and Theodorian Borca-Tasciuc; Department of Mechanical, Aerospace, and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, New York.
J18.34
Influence of Growth Parameters and Annealing on the Properties of MBE Grown GaAsSbN SQW. Liangjin Wu, Shanthi Iyer, Kalyan Nunna, Sudhakar Bharatan, Jia Li and Ward J. Collis; Electrical Engineering, North Carolina A&T State University, Greensboro, North Carolina.
J18.35
Current Voltage Characteristics of an Aluminium Gallium Nitride / Gallium
Nitride Polarization Barrier. Choudhury Jayant Praharaj, Jeonghyun
Hwang and Lester Eastman; Electrical Engineering, Cornell University, Ithaca,
New York.
J18.36
Explosive Porous Silicon - A New Microsystem and its Potential Applications. Dominik Clement, Joachim Diener and Dmitri Kovalev; Physics Department, TU Munich, Garching, Germany.
J18.37
ABSTRACT WITHDRAWN
J18.38
Two Dimensional Biphasic Nanocables from a C60 Based Acceptor-Bridge-Donor Dyad. S. Shankara Gayathri and Archita Patnaik; Chemistry, Indian Institute of Technology Madras, Chennai, Tamil Nadu, India.
SESSION J19: Applied Micro- and Nanotechnology
Chair: Joseph Michael
Friday Morning, April 1, 2005
Room 2003 (Moscone West)
8:30 AM J19.1
A New Approach for Roughness Gradient Fabrication. Tobias P. Kuenzler, Tanja K. Drobek and Nicholas D. Spencer; Surface Science, Federal Institute of Technology (ETH), Zuerich, Switzerland.
8:45 AM J19.2
Small Particle Manipulation Using the Stick-Slip Effect. Michael Eglin1, Robert W. Carpick1 and Mark A. Eriksson2; 1Engineering-Physics, University of Wisconsin - Madison, Madison WI, Wisconsin; 2Physics, University of Wisconsin - Madison, Madison, Wisconsin.
9:00 AM J19.3
Critical Process Issues in the Fabrication of a Lateral, Self-Cleaning, MEMS
Switch. Yong Shi1 and Sang-Gook Kim2; 1Mechanical Engineering, Stevens Institute of Technology, Hoboken, New Jersey; 2Mechanical Engineering, Massachusetts Institute of Technology, CAmbridge, Massachusetts.
9:15 AM J19.4
Novel Patterned Liquid Electrode for Synthesis of Polymer
Nanowires. Sathyajith Ravindran, University of California-Riverside
9:30 AM J19.5
Exploiting Nanoscale Structure to Tune Electrical Characteristics of Macroscopic
Films. Al-Amin Dhirani, Paul-Emile Trudeau and Yoshinori Suganuma;
University of Toronto, Toronto, Ontario, Canada.
9:45 AM J19.6
ABSTRACT WITHDRAWN
10:00 AM BREAK
SESSION J20: Self-Assembled Structures
Chair: Somuri Prasad
Friday Morning, April 1, 2005
Room 2003 (Moscone West)
10:30 AM J20.1
Responsive Supramolecular Assemblies from Homopolymeric and Small Organic
Molecular Building Blocks. Huisheng Peng and Yunfeng Lu; Chemical
and Biomolecular Engineering, Tulane University, New Orleans, Louisiana.
10:45 AM J20.2
Eutectic Al2O3-GdAlO3 Composite Consolidated by Combined Rapid Quenching and
Spark Plasma Sintering Technique. Kazuyuki Kakegawa1, Masayuki
Nagata1, Naofumi Uekawa1, Takashi Kojima1 and
Young-Hwan Han2; 1Faculty of Engineering, Chiba University,
Chiba-shi, Chiba, Japan; 2Department of Chemical Engineering and Materials
Science, University of California, Davis, Davis, California.
11:00 AM J20.3
Colloid Crystal Wires from Directed Assembly. Feng Li1, Xavier Badel2, Jan Linnros2 and John B. Wiley1; 1Department of Chemistry, University of New Orleans, New Orleans, Louisiana; 2Department of Microelectronics and Information Technology, KTH Royal Institute of Technology, SE-164 40 Kista, Sweden.
11:15 AM J20.4
The Performance of the Gate Electrode Using Co Thin Films Selectively Deposited
on SAMs Patterns for a-Si TFT. Heejung Yang1, Taewook Kwon1,
Jeonggil Lee1, Myungmo Sung2, Hyunjung Shin1,
Jiyoung Kim1 and Jaegab Lee1; 1School of Advanced
Materials Engineering, Kookmin University, Seoul, South Korea; 2Department
of chemistry, Kookmin University, Seoul, South Korea.
11:30 AM J20.5
Ink Depedence of Poly(dimethylsiloxane) Contamination in Microcontact Printing. Ruben
Sharpe1, Dirk Burdinski2, Jurriaan Huskens1,
Harold J. W. Zandvliet1, David N. Reinhoudt1 and Bene Poelsema1; 1MESA+
Institute for Nanotechnology and Department of Science and Technology, University
of Twente, Enschede, Overijssel, Netherlands; 2Molecular and Biomolecular
Engineering, Philips Research, Eindhoven, N. Brabant, Netherlands.
SESSION J21: Nanomaterials Synthesis and Applications
Chair: Mark McNie
Friday Afternoon, April 1, 2005
Room 2003 (Moscone West)
1:30 PM J21.1
Surface Electronic States and Electrostatic Attractive Forces between Metals
or Semiconductor and Tribocharged Polymers. Yoshihiro Momose1, Masahiro Umeki1, Daisuke Suzuki1 and Keiji Nakayama2; 1Materials Science, Ibaraki University, Hitachi, Japan; 2Nanotechnology, AIST, Tsukuba, Japan.
1:45 PM J21.2
Chirality Characterization of Dispersed Single Wall Carbon Nanotubes. Min Namkung1, Phillip Williams2, Candis Mayweather3, Buzz Wincheski1, Cheol Park4 and Juock S. Namkung5; 1NASA LaRC, Hampton, Virginia; 2National Research Council, NASA LaRC, Hampton, Virginia; 3Department of Chemistry, Spelman College, Atlanta, Georgia; 4National Institute of Aerospace, Hampton, Virginia; 5Naval Air Warfare Center, Patuxent River, Maryland.
2:00 PM J21.3
Energetic Neutral Atom Beam Lithography/Epitaxy for Nanoscale Device Fabrication. Elshan Akhadov, Alexander H. Mueller and Mark Hoffbauer; Los Alamos National Laboratory, Los Alamos, New Mexico.
2:15 PM J21.4
TiN/GaN Metal/Semiconductor Multilayer Nanocomposites Grown by Reactive Pulsed
Laser Deposition. Vijay Rawat1 and Timothy Sands1,2,3; 1School
of Materials Engineering, Purdue University, West Lafayette, Indiana; 2Electrical
and Computer Engineering, Purdue University, West Lafayette, Indiana; 3Birck
Nanotechnology Center, Purdue University, West Lafayette, Indiana.
2:30 PM J21.5
Improved Magneto-Rheological Elastomers: Preparation, Characterization, Actuation
and Application. R. Lloyd Carroll, Daniel B. Blum, Brandon R. Lunk
and Rich Superfine; Physics and Astronomy, University of North Carolina - Chapel
Hill, Chapel Hill, North Carolina.
2:45 PM J21.6
Zinc Powder Evaporation: an Efficient Way of Synthesizing a Wide Range of
High Quality ZnO Nanostructures at Lower Temperature. Yue Zhang1,2,
Jian He1, Yunhua Huang1, Yousong Gu1, Zhen Ji1 and
Cheng Zhou1; 1Department of Materials Physics, University
of Science and Technology Beijing, Beijing, China; 2State Key Laboratory
for Advanced Metals and Materials, University of Science and Technology Beijing,
Beijing, China.
Symposium Organizers
David LaVan
Yale University
Mechanical Engineering Dept.
Mason Labs
Rm. M3
9 Hillhouse Ave.
New Haven, CT 06511
Tel: 203-432-9662
Fax: 203-432-7654
david.lavan@yale.edu |
Mark McNie
QinetiQ Ltd.
Malvern Technology Centre
St. Andrews Rd.
Malvern
Worcestershire
WR14 3PS, United Kingdom
Tel: 44-1684-894-586
Fax: 44-1684-895-113
mmcnie@qinetiq.com |
Somuri Prasad
Sandia National Laboratories
Materials and Process Sciences Center
MS 0889
P.O. Box 5800
Albuquerque, NM 87185-0889
Tel: 505-844-6966
Fax: 505-844-4816
svprasa@sandia.gov |
Cengiz S. Ozkan
University of California-Riverside
Bourns College of Engineering
Mechanical Engineering Dept.
Rm. A305
Riverside, CA 92521
Tel: 951-787-5016
Fax: 951-787-2899
cozkan@engr.ucr.edu |
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