Microsystems include micromachines and micro-electro-mechanical systems (MEMS) as well as micro-optical-electro-mechanical systems (MOEMS). Nanosystems, also referred to as nano-electro-mechanical systems (NEMS) or molecular machines, can include devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical or chemical sensor application areas may be addressed with these technologies, such as inertial, magnetic, environmental, chemical, and biological detection. Many medical applications are also being investigated, such as drug delivery and the manipulation and isolation of cells. Microsystems and nanosystems have diversified into compound semiconductor materials technologies and thin-film smart (or active) materials, such as magnetostrictive, electrostrictive, piezoelectric, and ferroelectric materials, and shape memory alloys. New classes of materials are also in use, such as polymers, amorphous carbon-based thin films, porous materials, structural metals and magnetic alloys, specialized coatings, as well as new micro- and nanofabrication techniques, such as soft lithography, self organization, and high-aspect-ratio processing.
Session Topics
Papers are solicited in the following areas:
- RF and optical applications
- New materials and fabrication methodologies (including nanostructured materials, nanocomposites, and biomimic materials)
- Metrology, materials characterization, and mechanical behavior
- Surfaces, surface modifications, and interfaces
- Reliability, packaging, and life assessment
- Tribology (adhesion, friction, wear, and lubrication)
- Materials and mechanical issues at the micro-, nano- and molecular scale
- Modeling of processes and devices
- Microfluidic and nanofluidic technologies
- Systems for in vivo drug/gene/protein delivery
- Actuators for BioMEMS applications
- Micro- or nanofabricated cell- and tissue-based systems
- Biocompatibility of thin-film materials and devices
- Neural interfaces
- Sensing devices and materials
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Invited Speakers
Invited speakers include: Rashid Bashir (Purdue Univ.), Thomas George (Jet Propulsion Lab), Kenneth Goodson (Stanford Univ.), Mike Heller (Univ. of California-San Diego), Jim Kelly (Sandia National Labs-Livermore), Thomas Kenny (Stanford Univ.), Roya Maboudian (Univ. of California-Berkeley), Joe Michael (Sandia National Labs), Murat Okandan (Sandia National Labs), and Rishi Ra j (Univ. of Colorado). |
Joint Sessions
Joint sessions are anticipated with Symposia L: Structure and Mechanical Behavior of Biological Materials , and Symposia O: Thin Films—Stresses and Mechanical Properties XI . |
Tutorial Session
| A tutorial complementing this symposium is tentatively planned. Further information will be included in the program that will be available in January. (Find out more about the 2005 MRS Spring Meeting Tutorial Program.) |
Symposium Organizers
David LaVan
Yale University
Mechanical Engineering Dept.
Mason Labs
Rm. M3
9 Hillhouse Ave.
New Haven, CT 06511
Tel: 203-432-9662
Fax: 203-432-7654
david.lavan@yale.edu |
Mark McNie
QinetiQ Ltd.
Malvern Technology Centre
St. Andrews Rd.
Malvern
Worcestershire
WR14 3PS, United Kingdom
Tel: 44-1684-894-586
Fax: 44-1684-895-113
mmcnie@qinetiq.com |
Somuri Prasad
Sandia National Laboratories
Materials and Process Sciences Center
MS 0889
P.O. Box 5800
Albuquerque, NM 87185-0889
Tel: 505-844-6966
Fax: 505-844-4816
svprasa@sandia.gov |
Cengiz S. Ozkan
University of California-Riverside
Bourns College of Engineering
Mechanical Engineering Dept.
Rm. A305
Riverside, CA 92521
Tel: 951-787-5016
Fax: 951-787-2899
cozkan@engr.ucr.edu |
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