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MRS Symposium A: Micro- and Nanosystems Micro- and nanosystems contain elements and structures with dimensions in the micro- and nanoscales. Microsystems include micro-electromechanical systems (MEMS) devices and micro-optical-electromechanical systems (MOEMS) and their integration with electronics. Nanosystems, also referred to as nano-electromechanical systems (NEMS) and molecular machines, respectively, can include devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of sensor application areas may be addressed, such as inertial, magnetic, environmental, chemical, and biological detection, among others. Similarly, actuators may be used to address multiple application areas, including RF, optical, and fluidic devices. The increasing complexity of such systems is presenting challenges with new materials, contacting (electrically and physically) surfaces, and other critical surfaces and interfaces. More advanced forms of electronic integration and packaging are increasingly being employed. The combination of a better understanding of the properties of the materials and surfaces involved at even smaller scales and the advent of new tools with enhanced processing resolution and capabilities has extended the reach of this technology to incorporate moving elements and structures on the nano- and molecular scale. Advanced metrology on suitably designed micro- and nanostructures provides the opportunity to gain unprecedented resolution and, hence, insight into the local properties of materials and surfaces. Although originally based in silicon microelectronic materials technologies, microsystems and nanosystems have diversified into compound semiconductor materials technologies and thin-film smart (or active) materials, such as magnetostrictive materials, electrostrictive materials, piezoelectric materials, ferroelectric materials, and shape memory alloys. New materials, such as polymers, diamond and diamond-like films, silicon carbide, glass, porous materials, structural metals and magnetic alloys, and antistiction coatings, as well as new micro- and nanofabrication techniques, such as self organization and high-aspect-ratio processing, have also been adopted for many applications. The potential of microsystems and nanosystems to develop in many markets exists with rapid growth predictions; however, new product introduction and market acceptance is often limited by reliability, integration, and packaging issues, such as operation in multiple energy domains, harsh environments, and biocompatibility. Many materials challenges also arise in microsystems and nanosystems because of their scale and will have a direct effect on long-term performance such as those relating to large surface-to-volume ratios and increased influence of local microstructure variations. Papers are solicited in the following and related areas pertaining to microsystems and nanosystems (MEMS, NEMS, and molecular machines): ·
RF, optical, and biomedical applications Joint sessions are anticipated with Symposia D: Materials and Devices for Smart Systems, and U: Thin Films-Stresses and Mechanical Properties X. A tutorial complementing this symposium is tentatively planned. Further information will be included in the program that will be available in September. Invited speakers (partial list) include: Bernard Aspar (CEA-LETI, France), George Bachand (Sandia National Labs), Klaus Bade (Forschungszentrum Karlsruhe, IMT, Germany), Niels de Jonge (Philips Research Laboratories, The Netherlands), Mike Dugger (Sandia National Labs), Kenneth Goodson (Stanford Univ.), Bernd Michel (IZM, Germany), Tim Swager (Massachusetts Inst. of Technology), and Ann Witrouw (IMEC, Belgium). Symposium Organizers Arturo
Ayon David
LaVan Marc
Madou Mark
McNie Somuri
Prasad
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