* Invited paper
SESSION P1: MECHANICAL AND TRIBOLOGICAL PROPERTIES OF NANOSTRUCTURES
Chairs: Stan Veprek and Wen Jin Meng
Monday Morning, November 26, 2001
Room 311 (Hynes)
8:30 AM *P1.1
NANO- AND MICRO-SCALE CONTACT AT SURFACES: EXPERIMENT, SIMULATION
AND APPLICATIONS. Subra Suresh, Massachusetts Institute
of Technology, Dept of Materials Science and Engineering, Cambridge,
MA.
9:00 AM P1.2
HOW CAN WE UNDERSTAND THE UNUSUAL MECHANICAL PROPERTIES OF THE
SUPERHARD NANOCOMPOSITE COATINGS? Ali S. Argon, Department
of Mechanical Engineering, Massachusetts Institute of Technology,
Cambridge, MS; Stan Veprek, Institute for Chemistry of Inorganic
Materials, Technical University Munich, Garching, Munich, GERMANY.
9:15 AM P1.3
MECHANICAL AND TRIBOLOGICAL PROPERTIES OF CERAMIC NANOCOMPOSITE
COATINGS. B. Feng, D.M. Cao, W.J. Meng, Mechanical Engineering
Department, Louisiana State University, Baton Rouge, LA; L.E.
Rehn, P.M. Baldo, Materials Science Division, Argonne National
Laboratory, Argonne, IL.
9:30 AM P1.4
DETERMINING THE LIMIT OF HARDNESS IN TERNARY CARBIDE THIN FILMS.
James E. Krzanowski, Jose L. Endrino, Sirma H. Koutzaki,
Mechanical Engineering Dept., University of New Hampshire, Durham,
NH.
9:45 AM P1.5
NANO INDENTATION STUDIES OF TiN/ TiN/(Ti,Al)N MULTILAYERS COMBINED
WITH CROSS-SECTIONAL ELECTRON MICROSCOPY OBSERVATIONS. N.J.M.
Carvalho, J.Th.M. De Hosson, Department of Applied Physics,
Materials Science Center and Netherlands Institute of Metals Research,
University of Groningen, Groningen, THE NETHERLANDS.
10:00 AM BREAK
10:30 AM *P1.6
INSTABILITIES AND FAILURE PHENOMENA IN COMPRESSED THIN FILMS.
Anthony Evans, Princeton University, Princeton Materials
Institute, Princeton, NJ.
11:00 AM P1.7
MECHANICAL CHARACTERIZATION OF FUNCTIONALLY GRADED MATERIALS WITH
A YIELD STRENGTH GRADIENT. Ali Nayebi, Gérard Mauvoisin,
Olivier Bartier, Rochdi El Abdi, Rennes 1 University, Larmaur,
Rennes, FRANCE.
11:15 AM P1.8
DIFFERENT MECHANISMS OF ACHIEVING SUPEHARDNESS IN COATINGS: STABLE
NANOCOMPOSITES VS. HIGH COMPRESSIVE BIAXIAL STRESS. S. Veprek,
P. Karvankova, J. Prochazka, H. Männling, Institute for Chemistry
of Inorganic Materials, Technical University Munich, Garching,
GERMANY; M. Jilek, SHM Ltd., Novy Malin, CZECH REPUBLIC.
11:30 AM *P1.9
MECHANISMS OF PLASTIC DEFORMATION IN NANO- STRUCTURED CERAMIC
THIN FILM MATERIALS. Lars Hultman, Thin Film Physics Division,
Department of Physics, IFM, Linkoping University, SWEDEN.
SESSION P2: MACRO-, MICRO-, AND NANO- TRIBOLOLOGY I
Chairs: Yang Tse Cheng and James B. Adams
Monday Afternoon, November 26, 2001
Room 311 (Hynes)
1:30 PM *P2.1
RESEARCH CHALLENGES AND OPPORTUNITIES IN SURFACE ENGINEERING AT
THE NANO-SCALE. Jorn Larsen-Basse, National Science Foundation,
Surface Engineering and Materials Design Program, Arlington, VA.
2:00 PM P2.2
MD SIMULATIONS OF HIGH SPEED NANOINDENTATION AND PLOWING ON Al
SURFACE. Hualiang Yu, Arizona State Univ, Science and Engineering
of Materials Program, Tempe, AZ; James Adams, Arizona State
Univ, Dept of chemical and Materials Engineering, Tempe, AZ; Yang-Tse
Cheng, Louis Hector Jr. General Motor R&D Center, Warren,
MI.
2:15 PM P2.3
FRICTION ANISOTROPY AT Ni(100)/(100) INTERFACE. Yue Qi,
Tahir Cagin, William A. Goddard III, Material & Processing
Simulation Center, Caltech, Pasadena, CA; Yang-Tse Cheng, GM R&D
Center, Warren, MI.
2:30 PM P2.4
CHANGES IN SURFACE MECHANICAL PROPERTIES THROUGH ELECTROCHEMICAL
MODIFICATIONS. Martha M. McCann, Sean G. Corcoran, Virginia
Tech, Dept Materials Science and Engineering, Blacksburg, VA.
2:45 PM P2.5
KINETIC MONTE CARLO STUDY OF DISLOCATION ETCH PITS. Daniel
Bentz, Kenneth Jackson, University of Arizona, Dept of Materials
Science and Engineering, Tucson, AZ.
3:00 PM BREAK
3:30 PM *P2.6
DIRECTIONS FOR TRIBOLOGICAL COATING DEVELOPMENT. Allan Matthews,
Adrian Leyland, Research Centre in Surface Engineering, University
of Hull, Hull, UNITED KINGDOM.
4:00 PM P2.7
TRIBO-CONTACTS WITH MICRO SLIP IN COATED SOLIDS. Lanshi Zheng,
Seagate, Minneapolis, MN; and S. Ramalingam, University
of Minnesota, Minneapolis, MN.
4:15 PM P2.8
TRIBOLOGICAL AND MECHANICAL CHARACTERIZATION OF BORON CARBIDE
NANO-COMPOSITE COATINGS. Srikant Nekkanty, Mark Walter,
The Ohio State University, Department of Mechanical Engineering,
Columbus, OH; Gary Doll, Case Western Reserve University, Department
of Chemical Engineering, Cleveland, OH.
4:30 PM P2.9
NANOINDENTATION AND WEAR BEHAVIOR OF TITANIUM-NICKEL ALLOYS. Wangyang
Ni, Michigan State University, Dept of Materials Science and
Mechanics, East Lansing, MI; Yang-Tse Cheng, General Motors Research
and Development Center, Materials and Process Laboratory, Warren,
MI; David S. Grummon, Michigan State University, Dept of Materials
Science and Mechanics, East Lansing, MI.
4:45 PM P2.10
WETTING AND FRETTING ON QUASICRYSTALS. J.M. Dubois, P.
Brunet, G. Bonhomme, V. Demange and M.C. de Weerd, Ecole des Mines,
Nancy, FRANCE; E. Belin-Ferré LCPMR, Universite P. et M.
Curie, Paris, FRANCE; A. Merstallinger, Austrian Research Centers,
Seibersdorf, AUSTRIA; D.J. Sordelet, M. Besser, Dept of Materials
Science, ISU and Ames Laboratory, Ames, IA; J. Anderegg, C. Jenks,
V. Fournée, P.A. Thiel, Dept of Chemistry, ISU and Ames
Laboratory, Ames, IA.
SESSION P3: INDUSTRIAL APPLICATIONS OF SURFACE ENGINEERING I
Chairs: Clark VanTine Cooper and Wen Jin Meng
Tuesday Morning, November 27, 2001
Room 311 (Hynes)
8:30 AM *P3.1
CHARACTERIZATION OF ANTIWEAR FILMS USING MICRO-FOCUS XANES AND
IFM. P.R. Norton, Than Do, M. Nicholls, M. Kasrai, T. Woo,
N. Mosey, G.M. Bancroft, Dept of Chemistry, University of Western
Ontario, London, Ontario, CANADA.
9:00 AM P3.2
CHEMICAL AND MECHANICAL POLISHING BETWEEN STEEL AND CARBON-CONTAINING
CERAMIC COATINGS. Stephen J. Harris, Chemistry Dept., Ford
Scientific Research Lab, Dearborn, MI.
9:15 AM P3.3
BORON NITRIDE PROTECTIVE COATING FOR HIGH TEMPERATURE APPLICATIONS.
Ravi Bathe, R.D. Vispute, Ichiro Takeuchi, R.P. Sharma,
and T. Venkatesan, CSR, Dept of Physics, Univ of Maryland, College
Park, MD.
9:30 AM P3.4
SLIDING WEAR OF PLASMA TRANSFER WIRE ARC THERMAL SPRAYED LOW CARBON
STEEL COATINGS. T. Perry, Y.-T. Cheng, General Motors Research
and Development Center, Warren, MI; A. Edrisy, A.T. Alpas, Department
of Mechanical, Automotive and Materials Engineering, University
of Windsor, Windsor, Ontario, CANADA.
9:45 AM P3.5
SLIDING WEAR BEHAVIOR OF NANOSTRUCTURED AUSTENITIC HIGH-NITROGEN
STEELS. Robin Buescher, Andreas Krause, Alfons Fischer,
University of Essen, GERMANY.
10:00 AM BREAK
10:30 AM *P3.6
THE MICROSTRUCTURE AND WEAR BEHAVIOR OF Cr- AND W-DLC COATINGS
SPUTTER-DEPOSITED ONTO AISI 52100 SUBSTRATES AS ELUCIDATED USING
FOCUSED-ION-BEAM SEM. C.V. Cooper, United Technologies
Research Center, East Hartford, CT; R. Wang, A.G. Evans, Princeton
University, Princeton, NJ; H.K. Yoon, M.A. Taher, Caterpillar,
Inc., Peoria, IL.
11:00 AM P3.7
LOW FRICTION W-C:H COATINGS FOR WEAR RESISTANCE IN ROLLER BEARINGS
AND GEAR WHEELS. Thorsten Kacsich, Metaplas Ionon GmbH,
Bergisch Gladbach, GERMANY; Peter Werner Gold, Jörg Loos,
Institute for Machine Elements and Machine Design, RWTH Aachen,
GERMANY.
11:15 AM P3.8
PITTING FATIGUE IN AUTOMOTIVE PLANETARY GEAR SETS. Leonid C.
Lev, Neil Anderson, Gregory Mordukhovich, GM R&D, Warren,
MI.
11:30 AM P3.9
THE EFFECT OF DEPOSITION CONDITIONS ON THE PROPERTIES OF W-DLC
COATINGS. Christian Strondl, Hauzer Techno Coating, Venlo, THE
NETHERLANDS; Ton Hurkmans, Hauzer Techno Coating, Conover,
NC; Ron Dielis, Gerrit Jan van der Kolk, Hauzer Techno Coating,
Venlo, THE NETHERLANDS.
11:45 AM P3.10
PROCESS-PROPERTY RELATIONSHIPS OF ULTRA-THIN BORON CARBIDE FILMS.
J.D. Kiely, Mei-Ling Wu, Timothy Klemmer, Yiao-Tee Hsia,
Kent Howard, Seagate Research, Pittsburgh, PA.
SESSION P4: DEPOSITION, CHARACTERIZATION, AND PROPERTIES OF FILMS AND COATINGS
Chairs: James E. Krzanowski and Gary L. Doll
Tuesday Afternoon, November 27, 2001
Room 311 (Hynes)
1:30 PM *P4.1
IN-SITU STRESS CLINIC FOR SURFACE ENGINEERS. Roy Clarke,
University of Michigan Applied Physics Program, Darryl Barlett
and Charles Taylor III, k-Space Associates Inc., Ann Arbor, MI.
2:00 PM P4.2
CHARACTERIZATION OF THE DEGRADED MICRO- STRUCTURES OF A PLATINUM
ALUMINIDE COATING. Hyungjun Kim and Mark Walter, The Ohio
State University, Department of Mechanical Engineering Columbus,
OH.
2:15 PM P4.3
FUNCTIONALLY GRADED MATERIALS PRODUCED WITH HIGH POWER LASERS.
Jeff Th. De Hosson, Department of Applied Physics, Netherlands
Institute of Metals Research, Univ of Groningen, Groningen, THE
NETHERLANDS.
2:30 PM P4.4
IN-PLANE CRACKING BEHAVIOR OF THERMALLY AGED AND CYCLED THERMAL
BARRIER COATINGS. Zhehua Zhang, Jun Kamedaa,
Arne. H. Swanson, Iowa State University, Ames Laboratory, Ames,
IA. aOffice of Naval Research International
Field Office, Tokyo, JAPAN; Shigeo Sakurai, Hitachi Ltd., Mechanical
Engineering Research Laboratory, Hitachi, JAPAN; Minoro Sato,
Tohoku Electric Power Co. Ltd., Sendai, JAPAN.
2:45 PM P4.5
AN INVESTIGATION INTO THE COATING/SUBSTRATE BOND IN THE HIGH VELOCITY
PARTICLE CONSOLIDATION PROCESS. S.C. Johnson, T.J. Eden,
and M.F. Amateau, The Applied Research Laboratory, The Pennsylvania
State University, State College, PA.
3:00 PM BREAK
3:30 PM *P4.6
NANOSTRUCTURED THIN FILMS AND COMPOSITES. Jagdish Narayan,
Dept of MS&E, North Carolina State University, Raleigh, NC.
4:00 PM P4.7
SPECTROSCOPIC ELLIPSOMETRY AS A POTENTIAL IN-LINE METROLOGY TOOL
FOR POROSITY MEASUREMENTS OF LOW-K DIELECTRIC FILMS. N.V. Edwards,
J. Vella, Q. Xie, S. Zollner, I. Adihetty, Motorola Materials
and Structures Laboratories, Mesa, AZ; J. Vires and K.H. Junker,
Motorola Materials and Structures Laboratories, Austin TX.
4:15 PM P4.8
ALUMINOSILICATE ENVIRONMENTAL BARRIER COATINGS FOR SiC CERAMICS.
Ramanathan Krishnamurthy, Brian W. Sheldon, Division of
Engineering, Brown University, Providence, RI; J. Allen Haynes,
Oak Ridge National Laboratories, Oak Ridge, TN.
4:30 PM *P4.9
NOVEL PREPARATION METHOD OF THIN FILMS BY ABLATION PLASMA PRODUCED
BY INTENSE PULSED ION BEAM. Kiyoshi Yatsui, Hisayuki Suematsu,
Weihua Jiang, Tsuneo Suzuki, Sung-Chae Yang, Yoshiaki Kinemuchi,
and Makoto Hirai, Extreme-Energy Density Inst., Nagaoka Univ.
of Technology, Nagaoka, Niigata, JAPAN.
SESSION P5: POSTER SESSION
SYNTHESIS AND CHARACTERIZATION
Chairs: Wen Jin Meng, Ashok Kumar, Yip-Wah Chung, Gary L. Doll, Yang Tse Cheng and Stan Veprek
Tuesday Evening, November 27, 2001
8:00 PM
Exhibition Hall D (Hynes)
P5.1
ADVANCES IN CATHODIC ELECTRODEPOSITION OF ORGANOCERAMIC FILMS.
Igor Zhitomirsky, A. Petric, Dept. of Materials Science
and Engineering, McMaster University, Hamilton, Ontario, CANADA.
P5.2
IN-SITU MONITORING OF NUCLEATION STAGE DURING ALUMINUM-CVD FOR
NANO-STRUCTURE CONTROL. Tomohisa Iino, Masakazu Sugiyama,
and Yukihiro Shimogaki, Univ. of Tokyo, School of Engineering,
Tokyo, JAPAN.
P5.3
FABRICATION OF CaO INSULATOR COATINGS BY MOCVD FOR APPLICATION
IN FUSION REACTOR BLANKETS. Zuotao Zeng, Ken Natesan, Argonne
National Laboratory, Energy Technology Division, Argonne, IL.
P5.4
MEASUREMENT OF MECHANICAL PROPERTIES OF SINGLE AND MULTI-LAYERED
NITRIDE THIN FILMS PREPARED BY CATHODIC ARC DEPOSITION. A.K.
Sikdera, I.M. Irfana,
Ashok Kumara, Robert Durvinb
and M.D. Smithb; aCenter for
Microelectronics Research, College of Engineering, University
of South Florida, Tampa, FL; bBryCoat Inc.,
Safety Harbor, FL.
P5.5
CaO ELECTRICAL INSULATOR COATING ON V-4%Cr-4%Ti: FUNDAMENTALS
AND APPLICATIONS. J.-H. Park, K. Natesan and D.L. Smith,
Energy Technology Division and Technology Development Division,
Argonne National Laboratory, Argonne, IL.
P5.6
SPUTTER-DEPOSITED BCC TANTALUM ON STEEL WITH AN INTERFACIAL TANTALUM
NITRIDE LAYER. Anamika Patel, Marek Sosnowski, Leszek Gladczuk,
New Jersey Institute of Technology, Dept of Electrical Engineering,
Newark, NJ.
P5.7
A NOVEL SILICON-CARBON PRECURSOR FOR OLIGOMER CHEMICAL VAPOR DEPOSITION
OF SILICON CARBIDE FOR HARSH ENVIRONMENTAL APPLICATIONS. Ulrike
Futschik, Harry Efstathiadis, James Castracane, Alain E. Kaloyeros,
UAlbany Institute for Materials and School of Nanosciences and
Materials, The University at Albany-SUNY, Albany, NY; Leo Macdonald,
Susan Hayes, and Walter Sherwood, Starfire Systems Inc, Watervliet,
NY; and Costas Fountzoulas, Army Research Laboratory, Weapons
Material Directorate, Aberdeen Proving Ground, MD.
P5.8
Abstract Withdrawn
P5.9
NEW DEVELOPMENTS IN ELECTRODEPOSITION OF THIN FILMS FOR FUEL CELL
APPLICATIONS. Igor Zhitomirsky, A. Petric, McMaster Univ.,
Hamilton, Ontario, CANADA.
P5.10
Abstract Withdrawn
P5.11
HYDROGEN FREE, HIGH SP3 CoONTENT DLC FILMS PRODUCED
BY PULSED LASER ABLATION OF AMORPHOUS GRAPHITE. J. Haverkamp,
R.M. Mayo, Department of Nuclear Engineering, North Carolina
State University, Raleigh, NC; J. Narayan, T.K. Nath, C. Jin,
Department of Materials Science and Engineering, North Carolina
State University, Raleigh, NC.
P5.12
REAL-TIME UV-EXTENDED SPECTROSCOPIC ELLIPSOMETRY FOR CHARACTERIZATION
OF CUBIC BORON NITRIDE. J.A. Zapien, R.W. Collins and R.
Messier, Materials Research Laboratory, The Pennsylvania State
University, University Park, PA.
P5.13
COMPARISON OF MICROSTRUCTURES PRODUCED BY HIGH-KINETIC ENERGY
PULSED INTENSE ION BEAMS WITH THOSE FROM MORE CONVENTIONAL TECHNIQUES.
T.J. Renk, P.P. Provencio, S.V. Prasad, Sandia National
Laboratories, Albuquerque, NM; J.R. Treglio, Cutting Edge Products,
Poway, CA; M. Kawamura, Kitami Institute of Technology, Dept.
of Materials Science, Kitami, JAPAN.
P5.14
LASER WRITING OF NANOSTRUCTURES ON MAGNETIC FILM SURFACES WITH
OPTICAL NEAR FIELD EFFECTS. S.M. Huang, M.H. Hong, D.M.
Liu, W.D. Song and Y.F. Lu, Laser Microprocessing Laboratory,
Data Storage Institute and Department of Electrical & Computer
Engineering, National University of Singapore, SINGAPORE.
P5.15
CHARACTERISTICS OF POLYCRYSTALLINE SILICON THIN FILMS PREPARED
BY PULSED ION-BEAM EVAPORATION. Sung-Chae Yang, Ali Fazlat,
Hisayuki Suematsu, Weihua Jiang and Kiyoshi Yatsui, Extreme Energy-Density
Research Institute, Nagaoka University of Technology, Nagaoka,
Niigata, JAPAN.
P5.16
ELECTROCHEMICAL SYNTHESIS OF CARBON DIAMONDLIKE COVERS ON METALLIC
SUBSTRATES. Vladimir Novikov, Larisa Kuznetsova Institute
of Solid State and Semiconductor Physics, Minsk, BELARUS; Patrice
Aublanc LMGP ENSPG/CNRS, St Martin d'Héres; FRANCE; Michel
Mermoux, LEPMI/ENSEEG/CNRS, St. Martin d'Héres, FRANCE.
P5.17
PREPARATION OF TiFe THIN FILMS BY PULSED ION BEAM EVAPORATION.
H. Suematsu, T. Saikusa, T. Suzuki, W. Jiang and K. Yatsui
Extreme Energy-Density Research Institute, Nagaoka University
of Technology, Niigata, JAPAN.
P5.18
RAPID THERMAL PROCESSING OF POLYMER SURFACES. Michael J. Kelley,
Thomas Jefferson, National Accelerator Facility, FEL Group, Newport
News, VA and The College of William and Mary, Dept of Applied
Science, Williamsburg, VA; Fredrick C. Zumsteg, E.I. DuPont Co.
Inc., Central Research, Wilmington, DE.
P5.19
TIMING EFFECT OF SOLID SOURCE APPLICATIONS ON Si-C-N FILM DEPOSITION.
Hui Lin Chang, Jing Hwa Lin, Cheng Tzu Kuo, Department
of MS&E, National Chiao Tung University, Hsinchu, TAIWAN.
P5.20
DURABLE OPTICAL FILM FORMATION WITH O2 CLUSTER ION
ASSISTED DEPOSITION. Noriaki Toyoda, Shinji Matsui, Laboratory
of Advanced Science and Technology for Industry, Himeji Institute
of Technology, Hyogo, JAPAN; Michitaka Terasawa, Dept of Engineering,
Himeji Institute of Technology, Hyogo, JAPAN; Isao Yamada, Collaborative
Research Center for Cluster Ion Beam Process Technology, Kyoto,
JAPAN.
P5.21
SURFACE MODIFICATION OF ULTRAFINE WC/Co BY ION IMPLANTATION. S.-C.
Liaoa, L.D. Yub, G.W.
Shuya, T. Vilaithongc and
S.W. Honga, aMaterials Research
Lab., Industrial Technology Research Institute, Chutung, TAIWAN;
bInstitute for Science and Technology Development,
Chiang Mai University, Chiang Mai, THAILAND; cFast
Neutron Research Facility, Physics Dept., Chiang Mai University,
Chiang Mai, THAILAND.
P5.22
HOMOEPITAXIAL GROWTH ON THE Ge(100) AND THE Sb-TERMINATED Ge(100)
SURFACE. Min Li, Eric I. Altman, Yale University, Department
of Chemical Engineering, New Haven, CT.
P5.23
ENGINEERING THE Si(111) 7x7 SURFACE ENERGY USING Ge. J.B. Maxson,
B. Yang, A.R. Woll, and M.G. Lagally, University of Wisconsin-Madison,
Madison, WI.
P5.24
PRECISE CONTROL OF CVD-ZrO2 FILM PROPERTIES BASED ON
KINETIC INFORMATION. Kawamoto Takashi and Yukihiro Shimogaki,
Depertment of Materials Engineering, University of Tokyo, Tokyo,
JAPAN.
P5.25
BIOCOMPATIBLE THIN FILMS ON RARE EARTH BASED PERMANENT MAGNETS.
Ecaterina Vasilescu, Paula Drob, Romanian Academy, Institute
of Physical Chemistry, Bucharest, ROMANIA; Doina Raducanu, Lucia
Angelescu, Politehnical University of Bucharest, Bucharest, ROMANIA;
Constantin Iliuc, The Institute of Solid Mechanics, Bucharest,
ROMANIA.
P5.26
SINGLE POLYCRYSTALLINE FERROELECTRIC SBN THIN FILMS OBTAINED FROM
SYNTHESIS OPTIMIZATION ON OXIDE PRECURSOR METHOD. Eudes Borges
Araújo, Universidade Estadual Paulista, Departamento
de Física e Química, Ilha Solteira, SP, BRAZIL;
Ricardo Gonçalves Mendes, José Antonio Eiras, Universidade
Federal de São Carlos, Departamento de Física, São
Carlos, SP, BRAZIL.
P5.27
INVESTIGATION OF MAGNETRON SPUTTERING CHARACTERISTICS USING THREE
DIMENSIONAL MONTE-CARLO SIMULATION METHOD. Jai Kwang Shin, Seong
Gu Kim, Young Dong Lee, Jae Joon Oh, Ji Hyun Hur, Won Taek
Park, Samsung Advanced Institute of Technology, Yongin, KOREA.
P5.28
Abstract Withdrawn
P5.29
MOTION OF SAPPHIRE SURFACE STEPS. N. Ravishankar, C.B.
Carter, Dept. of Chem. Engr. Materials Science, University of
Minnesota, Minneapolis, MN.
SESSION P6/B10: JOINT SESSION
SURFACE ENGINEERING ISSUES IN MEMS STRUCTURES AND DEVICES
Chairs: Kathyrn J. Wahl and S. Mark Spearing
Wednesday Morning, November 28, 2001
Room 311 (Hynes)
8:30 AM *P6.1/B10.1
SURFACE TREATMENTS FOR MICROSYSTEMS: COATING ISSUES AND TRIBOLOGICAL
MEASUREMENT METHODS. M.T. Dugger and S.V. Prasad, Sandia
National Laboratories, Albuquerque, NM.
9:00 AM P6.2/B10.2
DIAMOND LIKE NANOCOMPOSITE (DLN) COATINGS FOR LIGA MEMS: TRIBOLOGICAL
BEHAVIOR AND COATINGS METHODOLOGY. Somuri Prasad, Todd
Christenson, Sandia National Laboratories, Albuquerque, NM.
9:15 AM P6.3/B10.3
CONFORMAL DEPOSITION OF AMORPHOUS HYDROCARBON BASED COATINGS ON
METALLIC HIGH-ASPECT-RATION MICRO-SCALE STRUCTURES (HARMs) BY
LIGA MICROFABRICATION. D.M. Cao, T. Wang, W.J. Meng, K.W.
Kelly, Mechanical Engineering Department, Louisiana State University,
Baton Rouge, LA.
9:30 AM P6.4/B10.4
DEPOSITION OF LOW SURFACE ENERGY, WEAR-RESISTANT FILMS ON MEMS-LIGA
DEVICES USING AN ENERGETIC PULSED PLASMA IMMERSION PROCESS. Kumar
Sridharan, University of Wisconsin, Madison, WI; Alfredo Morales,
Sandia National Laboratory, Livermore, CA; Erik Wilson, University
of Wisconsin, Madison, WI; and Joseph Woodworth, Sandia National
Laboratory, Albuquerque, NM.
9:45 AM P6.5/B10.5
STUDIES OF TRIBOLOGICAL PROCESSES ON ULTRANANOCRYSTALLINE DIAMOND
(UNCD) THIN FILMS FOR MULTIFUNCTIONAL MEMS DEVICES. A.V. Sumant,
O. Auciello, A.M. Dhote, D.M. Gruen, and J.A. Carlisle, Materials
Science Division, Argonne National Laboratory, Argonne, IL; A.
Erdemir, J. Andersson, and R.A. Erck, Energy Technology Division,
Argonne National Laboratory, Argonne, IL; M.N. Gardos, Raytheon
Electronic Company, El Segundo, CA.
10:00 AM BREAK
10:30 AM *P6.6/B10.6
MECHANICAL TESTING OF FREE-STANDING THIN FILMS. W.N. Sharpe,
Jr., Johns Hopkins University, Department of Mechanical Engineering,
Baltimore, MD.
11:00 AM P6.7/B10.7
ROLE OF MICROSTRUCTURE IN FRACTURE AND FATIGUE PROCESSES IN MICRON-SCALE
SILICON STRUCTURAL FILMS. Christopher L. Muhlstein, University
of California, Dept of Materials Science and Engineering, Berkeley,
CA; Eric A. Stach, National Center for Electron Microscopy,
Lawrence Berkeley National Laboratory, Berkeley, CA; William G.
Stratton, University of Minnesota, Dept of Materials Science and
Engineering, Minneapolis, MN; Stuart B. Brown, Exponent Inc.,
Natick, MA; Robert O. Ritchie, University of California, Dept
of Materials Science and Engineering, Berkeley, CA.
11:15 AM P6.8/B10.8
STICTION IN AMORPHOUS-DIAMOND (A-D) THIN FILM STRUCTURES. R.V.
Ellis, T.A. Friedmann, J.P. Sullivan, M.P. de Boer, J.A. Knapp,
W.K. Schubert, M. Mitchell, Sandia National Labs, Albuquerque,
NM.
11:30 AM *P6.9/B10.9
SURFACE MECHANICAL PROPERTIES AND TRIBOLOGY: A COMBINED NANOSCALE
AND MACROSCALE APPROACH. Kathryn J. Wahl, U.S. Naval Research
Laboratory, Washington, DC.
SESSION P7: INDUSTRIAL APPLICATIONS OF SURFACE ENGINEERING II
Chairs: Gary L. Doll and Yip-Wah Chung
Wednesday Afternoon, November 28, 2001
Room 311 (Hynes)
1:30 PM *P7.1
INTRINSIC ADHESION AT ALUMINUM/CERAMIC INTERFACES: AN AB INITIO
APPROACH TO SURFACE ENGINEERING. Louis G. Hector, Jr.,
Thomas A. Perry, General Motors R&D Center, Tribology and
Surface Eng. Dept., Warren, MI; Donald J. Siegel, Univ. of Illinois,
Dept. of Physics, Urbana, IL; James B. Adams, Arizona State Univ.,
Chemical and Materials Engineering, Tempe, AZ.
2:00 PM P7.2
FUNCTIONALLY GRADED CVD MULLITE COATINGS. Soumendra Basu,
Vinod Sarin, Boston University, Dept of Manufacturing Engineering,
Boston, MA.
2:15 PM P7.3
CHARACTERIZATION OF HIGH ALUMINA REFRACTORY CERAMICS TREATED WITH
COMBINED TWO LASER SURFACE PROCESSING. Dimitrios Triantafyllidis,
Univ of Manchester Inst of Science and Technology, Dept of Mechanical
Engineering, Manchester, UNITED KINGDOM; Johanna R. Bernstein,
F. Howard Stott, Univ of Manchester Inst of Science and Technology,
Corrosion and Protection Centre, Manchester, UNITED KINGDOM; Lin
Li, Univ of Manchester Inst of Science and Technology, Dept of
Mechanical Engineering, Manchester, UNITED KINGDOM.
2:30 PM *P7.4
COATINGS AND SURFACE ENGINEERING FOR METAL CUTTING APPLICATIONS.
Aharon Inspektor, Kennametal Inc., Latrobe, PA.
3:00 PM BREAK
3:30 PM *P7.5
INDUSTRIAL PRACTICE OF CARBON-BASED COATINGS. O. Massler,
R. Herb, J. Karner, M. Grischke, Balzers Limited, Balzers, LIECHTENSTEIN.
4:00 PM P7.6
TRIBOLOGICAL BEHAVIOR OF Cr-DLC NANOCOMPOSITE FILMS. Varshni
Singh, Jiechao Jiang, E.I. Meletis, Louisiana State University,
Materials Science and Engineering Program of Mechanical Engineering,
Baton Rouge, LA.
4:15 PM P7.7
CHARACTERISTICS OF Cr-Al-N-O THIN FILMS PREPARED BY PULSED LASER
DEPOSITION. Makoto Hirai, Hajime Saito, Tsuneo Suzuki,
Hisayuki Suematsu, Weihua Jiang and Kiyoshi Yatsui, Extreme Energy-Density
Research Institute, Nagaoka University of Technology, Nagaoka,
Niigata, JAPAN.
4:30 PM P7.8
AN INVESTIGATION OF Si-DLC FILM STRUCTURE AND CHEMISTRY RELATIONSHIPS
TO DEPOSTION PROCESS CONDITIONS AND MECHANICAL PROPERTIES. Ryan
D. Evans, Jeffrey T. Glass, Philip W. Morrison, Department of
Chemical Engineering, Case Western Reserve University, Cleveland,
OH; Gary L. Doll, Advanced Materials Research and Development,
The Timken Company, Canton, OH.
SESSION P8: POSTER SESSION
MECHANICAL, TRIBOLOGICAL, AND OTHER PROPERTIES
Chairs: Wen Jin Meng, Ashok Kumar, Yip-Wah Chung, Gary L. Doll, Yang Tse Cheng and Stan Veprek
Wednesday Evening, November 28, 2001
8:00 PM
Exhibition Hall D (Hynes)
P8.1
MICROSTRUCTURE AND TRIBOLOGICAL PROPERTIES OF DLC/TiC/Ag COMPOSITE
COATINGS IN VACUUM AND AIR ENVIRONMENTS. Jose Endrino,
James Krzanowski, University of New Hampshire, Dept of Mechanical
Engineering, Durham, NH; Jose Nainaparampil, Systran Inc, Dayton,
OH.
P8.2
STUDIES OF ANISOTROPIC VOIDS MICROSTRUCTURE OF YSZ DEPOSITS BY
SMALL-ANGLE X-RAY SCATTERING. Jan Ilavsky, University of
Maryland, College Park, MD and National Institute of Standards
and Technology, Gaithersburg, MD; Andrew J. Allen and Gabrielle
G. Long, National Institute of Standards and Technology, Gaithersburg,
MD; Pete R. Jemian, University of Illinois, Urbana, IL; Jean-Francois
Bisson, NRC, Boucherville, CANADA.
P8.3
Abstract Withdrawn
P8.4
MECHANICAL AND ELECTRICAL PROPERTIES OF NANOCRYSTALLINE AND EPITAXIAL
TiN FILMS. Haiyan Wang, Alex Kvit, Xinghang Zhang, Carl
C. Koch, Jarayan Narayan, Department of MS&E, North Carolina
State University, Raleigh, NC.
P8.5
PHASE ANALYSIS FOR SINGLE CRYSTALLINE SILICON SCRATCHED BY SPHERICAL
DIAMOND TIP. Seong-Min Jeong, Han-Seog Oh, Sung-Eun Park,
Hyun-Ho Kim, Hong-Lim Lee, Department of Ceramic Engineering,
Yonsei University, Seoul, KOREA.
P8.6
CROSS-SECTIONAL PHASE ANALYSIS OF SINGLE CRYSTALLINE SILICON INDENTED
BY ROCKWELL INDENTOR. Sung-Soon Kim, Han-Seog Oh, Seong-Min
Jeong, Hong-Lim Lee, Yonsei Univ, Seoul, KOREA.
P8.7
INVESTIGATION OF STRUCTURAL AND MECHANICAL PROPERTIES OF LASER
DEPOSITED MICROLAMINATE HARD COATINGS. Manoj Radder and
Ashok Kumar, Department of Electrical Engineering, University
of South Alabama, Mobile, AL.
P8.8
ASSESSMENT OF MICROSCALE TEST METHODS OF PEELING AND SPLITTING
ALONG SURFACE OF THIN FILM/ SUBSTRATES. Yueguang Wei, LNM,
Institute of Mechanics, Chinese Academy of Sciences, Beijing,
CHINA.
P8.9
THE EFFECT OF PRE-OXIDATION ON THE OXIDATION BEHAVIOUR OF Ti-2Al-2.5Zr
ALLOY AT 300° C IN AN ALKALINE STEAM. Xiaotao Zua,b,
Xiangdong Fenga, Zhiguo Wanga,
Guangting Zenga, and Libin Lina,
aKey Laboratory for Radiation Physics and Technology
of Ministry of Education, Department of Physics, Sichuan University,
Chengdu, PR CHINA; bDepartment of Nuclear Engineering
and Radiological Sciences, University of Michigan, Ann Arbor,
MI.
P8.10
THERMO-MECHANICAL EFFECTS OF CERAMIC THERMAL BARRIER COATINGS
ON DIESEL ENGINE PISTON. Jesse Muchai, David E. Klett,
Ajit D. Kelkar and Jag Sankar, NSF Center for Advanced Materials
and Smart Structures, North Carolina A&T State University,
Greensboro, NC.
P8.11
TRIBOLOGY OF MATERIAL CONTACTS UNDER DYNAMIC LOADING, STUDIED
BY ELECTRICAL RESISTANCE MEASUREMENT. Xiangcheng Luo, D.D.L.
Chung, Composite Materials Research Laboratory, University
at Buffalo, The State University of New York at Buffalo, Buffalo,
NY.
P8.12
MORPHOLOGICAL AND NANOTRIBOLOGICAL PROPERIES OF DIAMOND LIKE THIN
FILMS ERODED BY A NITROGEN PLASMA. R. Prioli, S. Castaneda,
F.L. Freire Jr., Dept of Physics, Pontificia Universidade Catolica
do Rio de Janeiro, Rio de Janeiro, BRAZIL; W.H. Schulte, Dept
of Physics and Astrophysics, Rutgers Univ, NJ.
P8.13
DUCTILE MICROMACHINING OF SILICON FOR MEMS APPLICATIONS. Yury
Gogotsi, Tom Juliano, Drexel University, Department of
Materials Engineering, Philadelphia, PA. Sabri Cetinkunt, Nishan
Bopearatchy, University of Illinois at Chicago, Department of
Mechanical Engineering, Chicago, IL.
P8.14
FABRICATION AND MICROSTRUCTURES OF MECHANICALLY INDUCED SURFACE
NANOCRYSTALLIZATION IN AN ALUMINUM ALLOY. Y. Hong, X. Wu,
State Key Lab of Nonlinear Mechanics, Institute of Mechanics,
Chinese Academy of Sciences, Beijing, PR CHINA; J. Lu, LASMIS,
Univ of Technology of Troyes, Troyes, FRANCE; K. Lu, State Key
Lab for RSA, Institute of Metal Research, Chinese Academy of Sciences,
Shenyang, PR CHINA.
P8.15
STRESSES AND MECHANICAL EFFECTS OF OXIDE FILMS ON TUNGSTEN AND
MOLYBDENUM SINGLE CRYSTALS. J.E. Talia, Dept of Mechanical Engineering,
Wichita State Univ, Wichita, KS; R. Gibala, Dept of Materials
Science & Engineering, Univ of Michigan, Ann Arbor, MI.
P8.16
NANOSTRUCTURED ULTRATHIN FILMS OF SILICATE CLAY AND POLYELECTROLYTES:
DEPOSITION PARAMETERS AND MECHANICAL PROPERTIES BY NANOINDENTATION.
Rigoberto Advincula, Xiaowu Fan, Department of Chemistry,
University of Alabama at Birmingham, Birmingham, AL.
P8.17
Transferred to P3.5
P8.18
PROPERTIES OF CVD-GROWN TiSiN MATERIAL FOR COPPER DIFFUSION BARRIER
APPLICATIONS. Dalaver Anjum, Katharine Dovidenko, Serge
Oktyabrsky, Eric Eisenbraun, Alain E. Kaloyeros, Univ of Albany,
Institute for Materials at University at Albany-SUNY, Albany,
NY.
P8.19
DIAMOND COATED WC TOOLS FOR MACHINING WOOD AND PARTICLE BOARD.
M.S. Raghuveer, S.N. Yoganand, K. Jagannadham, North Carolina
State University, Department of Materials Science and Engineering,
Raleigh, NC; R.L. Lemaster, North Carolina State University, Department
of Wood and Paper Science, Raleigh, NC; J.A. Bailey, North Carolina
State University, Department of Mechanical Engineering, Raleigh,
NC.
P8.20
CORROSION RESISTANCE AND STABILITY OF SELF ASSEMBLED SILANE MONO-
AND MULTI-LAYERS ON ALUMINIUM AND ALUMINIUM ALLOY SURFACES. A.P.G.
Robinson, Q. Guo, Nanoscale Physics Research Laboratory, School
of Physics and Astronomy, The University of Birmingham, UNITED
KINGDOM; J.A. Preece, School of Chemistry, The University of Birmingham,
UNITED KINGDOM; M. Hebbron, S. Harris, G.A. Johnson, Sowerby Research
Centre, BAe Systems, Filton, Bristol, UNITED KINGDOM.
P8.21
INTERFACIAL FORCE MICROSCOPY AND ITS APPLICATION IN METAL MATRIX
COMPOSITES. Robb M. Winter, Jan A. Puszynski, South Dakota
School of Mines and Technology, Dept of Chemistry and Chemical
Engineering, Rapid City, SD; Anthanasios N. Chantis, Berthold
E. Liebig, South Dakota School of Mines and Technology, Materials
Science Ph.D. Program, Rapid City, SD.
P8.22
ASSESSING TRIBOLOGICAL PROPERTIES OF METAL CARBIDE-METAL NACREOUS
NANOSTRUCTURES USING NANOSCRATCH METHODS. Rachel W. Obbard,
Todd S. Gross, Department of Mechanical Engineering, University
of New Hampshire, Durham, NH.
P8.23
PREPARATION AND CHARACTERISATION OF SELF ASSEMBLED MONOLAYERS
FOR THE REDUCTION OF ICE ADHESION ON OXIDE SURFACES. A.P.G.
Robinson, Q. Guo, Nanoscale Physics Research Laboratory, School
of Physics and Astronomy, The University of Birmingham, UNITED
KINGDOM; J.A. Preece, School of Chemistry, The University of Birmingham,
UNITED KINGDOM; D. Hammond, S. Harris, G.A. Johnson, Sowerby Research
Centre, BAe Systems, Filton, Bristol, UNITED KINGDOM.
P8.24
NOVEL NANOSTRUCTURED AMORPHOUS DIAMOND-TiN AND TiC COMPOSITES
FOR BIOMEDICAL APPLICATIONS. Roger J. Narayan, Jerome J.
Cuomo, Gary Poeling and Jagdish Narayan, Dept of Materials Science
and Engineering, NCSU, Raleigh, NC, and Wake Forest University,
School of Medicine, Medical Center Blvd, Winsten-Salem, NC.
P8.25
FIELD EMISSION PROPERTIES OF NITROGEN-DOPED DIAMOND-LIKE CARBON
FILMS DEPOSITED BY A MAGNETRON SPUTTER TYPE NEGATIVE ION SOURCE.
Kie Moon Song, Department of Applied Physics, Konkuk University,
KOREA; Namwoong Paik, Steven Kim, Daeil Kim, and Sungjin Kim,
SKION Corporation, Hoboken, NJ.
P8.26
THERMOELECTRIC PROPERTIES OF B12+xC3-x
THIN FILMS PREPARED BY PULSED ION-BEAM EVAPORATION. H. Suematsu,
K. Kitajima, I. Ruiz, T. Suzuki, W. Jiang and K. Yatsui Extreme
Energy-Density Research Institute, Nagaoka University of Technology,
Niigata, JAPAN; K. Kobayashi, D. Shimbo, Nob. Harada, M. Takeda
Faculty of Engineering, Nagaoka University of Technology, Niigata,
JAPAN.
P8.27
EFFECT OF Co SEED LAYERS ON THE MAGNETIC ANISOTROPY OF Au/Co METALLIC
MULTILAYERS. M. Kamiko, H. Mizuno, J. Xu and R. Yamamoto,
Institute of Industrial Science, University of Tokyo, Meguro-ku,
Tokyo, JAPAN.
P8.28
MICROTEXTURE OF COPPER-LOADED CARBON AEROGELS PREPARED BY AN ION
EXCHANGE METHOD. Noriko Yoshizawa, Mildred S. Dresselhaus,
Massachusetts Institute of Technology, Dept of Physics, Cambridge,
MA; Joe Satcher, Ted Baumann, Lawrence Livermore National Laboratory,
Livermore, CA; Katsumi Kaneko, Chiba Univ, Dept of Chemistry,
Chiba, JAPAN; Morinobu Endo, Shinshu Univ, Dept of Electrical
& Electronic Engineering, Nagano, JAPAN.
SESSION P9: MACRO-, MICRO-, AND NANO- TRIBOLOGY II
Chairs: Ashok Kumar and Stan Veprek
Thursday Morning, November 29, 2001
Room 311 (Hynes)
8:30 AM *P9.1
SUPERLUBRICITY AND WEARLESS SLIDING IN DIAMOND- LIKE CARBON FILMS.
Ali Erdemir, Argonne National Laboratory, Energy Technoloy
Division, Argonne, IL.
9:00 AM P9.2
PLASMA DEPOSITION OF AMORPHOUS CARBON FILMS FROM CH4
ATMOSPHERES HIGHLY DILUTED IN Ar. Luiz Gustavo Jacobsohn,
Fernando Lázaro Freire Jr., Departamento de Física,
Pontifícia Universidade Católica do Rio de Janeiro,
Rio de Janeiro, BRAZIL.
9:15 AM P9.3
TRIBOLOGICAL PROPERTIES OF FILMS AND POLYURETHANE PADS IN CHEMICAL
MECHANICAL PLANARIZATION PROCESS. A.K. Sikder, Frank Giglio,
John Wood, Ashok Kumar and Mark Anthony, Center for Microelectronics
Research, College of Engineering, University of South Florida,
Tampa, FL.
9:30 AM P9.4
MOLECULAR DYNAMICS SIMULATIONS OF CMP OF A-SiO2. Evgueni
Chagarov and James B. Adams, Arizona State University,
Dept of Chemical and Materials Engineering, Tempe, AZ.
9:45 AM P9.5
DEVELOPMENT AND APPLICATION OF NEW ACCELERATED QUANTUM CHEMICAL
MOLECULAR DYNAMICS PROGRAM TO SIMULATE CHEMICAL-MECHANICAL POLISHING
PROCESS. Toshiyuki Yokosuka, Daisuke Kamei, Hitoshi Kurokawa,
Hui Zhou, Seiichi Takami, Momoji Kubo, Akira Miyamoto,
Tohoku Univ., Dept. of Materials Chemistry, Sendai, JAPAN; Akira
Imamura, Hiroshima Kokusai Gakuin Univ., Dept. of Mathematics,
Hiroshima, JAPAN.
10:00 AM P9.6
STOICHIOMETRIC Ti-C AND Ti-Si-C FILMS DEPOSITED BY MAGNETRON SPUTTER/
PULSED LASER DEPOSITION. Jose J. Nainaparampil, Systan Federal
Inc., Dayton, OH; James E. Krzanowski and A.R. Phani,
University of New Hampshire, Durham, NH.
10:15 AM P9.7
IONIZING RADIATION EFFECTS ON INTERFACES IN CARBON NANOTUBE-POLYMER
COMPOSITES. Julie P. Harmon, Patricia Anne O. Muisener,
Lori Adornato, LaNetra Clayton, John D'Angelo, Department of Chemistry,
University of South Florida, Tampa, FL; Arun K. Sikder, Ashok
Kumar, Center for Microelectronics Research, University of South
Florida, Tampa, FL; Alan M. Cassell, Eloret Corporation, NASA
Ames Research Center, Moffett Field, CA.