Hynes Convention Center and Sheraton Boston Hotel
Boston, Massachusetts
November 26-30, 2001

Research Tools Seminars

View several Research Tools Seminars' presentations online

As a complement to the 2001 MRS Fall Meeting, the Materials Research Society is once again pleased to offer Research Tools Seminars, an educational program introduced at last year's fall meeting. This seminar series will focus on the scientific basis and practical application of commercially available, state-of-the-art tools for materials research. Held in the Exhibit Hall, Hynes Convention Center, each of the following seminars will describe a technical approach to meet a particular challenge, as embodied in commercially-available products or tools.

Tuesday, November 27

2:30 pm-
3:30 pm
In Situ Wafer Temperature Measurement
Engelhard Corporation · Portland, OR
This seminar will present the current strengths and limitations in optical wafer temperature measurement during integrated circuit processing, along with new technologies for improved wafer temperature measurement.
3:30 pm-
4:30 pm
Fine Particle Characterization: Size, Shape and Structure
Thermo Oriel · Stratford, CT
A new technology to characterize the size and size distribution of fine particles including those with non-spherical will be presented. Particle agglomerates can be quantified for size by the number of constituent monomers, and for compactness by their fractal dimension.


Wednesday, November 28

2:30 pm-
3:30 pm
Characterization of Deformation at the Nanometer Scale
TexSEM Laboratories, Inc. · Draper, UT
Transmission electron microscopes can measure and map the rapidly changing crystallographic orientation associated with deformation at the nanoscale. An automated technique to analyze and graphically present the orientation data will be presented.
3:30 pm-
4:30 pm
Comprehensive Compound Identification in the SEM
Thermo NORAN · Middleton, WI
A single system using electron beams will be described that provides surface morphology, chemical identification and crystallographic identification, all at the microscopic level for materials characterization.

 

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