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Hynes Convention Center and Sheraton
Boston Hotel
Boston, Massachusetts
November 26-30, 2001
Research Tools Seminars
View several Research Tools
Seminars' presentations online
As a complement to the 2001 MRS Fall Meeting,
the Materials Research Society is once again pleased to offer
Research Tools Seminars, an educational program introduced at
last year's fall meeting. This seminar series will focus on the
scientific basis and practical application of commercially available,
state-of-the-art tools for materials research. Held in the Exhibit
Hall, Hynes Convention Center, each of the following seminars
will describe a technical approach to meet a particular challenge,
as embodied in commercially-available products or tools.
Tuesday, November 27
2:30 pm-
3:30 pm |
In Situ Wafer Temperature Measurement
Engelhard Corporation · Portland,
OR |
| This seminar will present the
current strengths and limitations in optical wafer temperature
measurement during integrated circuit processing, along with
new technologies for improved wafer temperature measurement. |
3:30 pm-
4:30 pm |
Fine Particle Characterization:
Size, Shape and Structure
Thermo Oriel · Stratford, CT |
| A new technology to characterize
the size and size distribution of fine particles including those
with non-spherical will be presented. Particle agglomerates can
be quantified for size by the number of constituent monomers,
and for compactness by their fractal dimension. |
Wednesday, November 28
2:30 pm-
3:30 pm |
Characterization of Deformation
at the Nanometer Scale
TexSEM Laboratories, Inc. ·
Draper, UT |
| Transmission electron microscopes
can measure and map the rapidly changing crystallographic orientation
associated with deformation at the nanoscale. An automated technique
to analyze and graphically present the orientation data will
be presented. |
3:30 pm-
4:30 pm |
Comprehensive Compound Identification
in the SEM
Thermo NORAN · Middleton, WI |
| A single system using electron
beams will be described that provides surface morphology, chemical
identification and crystallographic identification, all at the
microscopic level for materials characterization. |
HQ Contact Information:
Member Services
Materials Research Society
506 Keystone Drive
Warrendale, PA 15086-7573
USA
E-mail: info@mrs.org
Telephone: 724-779-3003
Fax: 724-779-8313
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